Study on a method of improving the quality of excimer laser drilling

GUO Shang-yong; CHEN Tao; LIU Shi-bing

To improve the quality of excimer laser drilling,the factors affecting the drilling quality with excimer laser system are analyzed.Based on the analysis,a new method for micro-drilling is put forward and an optical system is designed.The experimental result shows that when the excimer laser with wavelength of 248nm drill on the polymethyl methacrylate with this system,the figure of the micro-hole is regular and the quality of the holes is improved.The system improves the speed and the quality of micro-drilling and is feasible in industrial areas.

Corresponding author: LIU Shi-bing, sbliu@bjut.edu.cn

1. College of Laser Engineering, Beijing University of Technology, Beijing 100022, China

Received Date: 2005-10-24

Accepted Date: 2006-02-27

Available Online: 2006-11-25

Abstract: To improve the quality of excimer laser drilling,the factors affecting the drilling quality with excimer laser system are analyzed.Based on the analysis,a new method for micro-drilling is put forward and an optical system is designed.The experimental result shows that when the excimer laser with wavelength of 248nm drill on the polymethyl methacrylate with this system,the figure of the micro-hole is regular and the quality of the holes is improved.The system improves the speed and the quality of micro-drilling and is feasible in industrial areas.

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Reference (10)

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Study on a method of improving the quality of excimer laser drilling

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References

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通讯作者: 陈斌, bchen63@163.com

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