Calculation and analysis of light scattering and differential scattering cross section from a spherical particle on silicon wafer
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Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai 201800, China;
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2.
Graduate School of the Chinese Academy of Sciences, Beijing 100039, China
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Corresponding author:
CHENG Zhao-gu, zgcheng@163.com
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Received Date:
2005-10-12
Accepted Date:
2005-12-12
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Abstract
Based on Mie theory,the phase difference model for calculating and analyzing the spatial distribution of scattering intensity from a spherical particle on a smooth surface radiated by a linearly polarized light beam is obtained.The differential scattering cross section is calculated when the s and p polarized light irritates the particles at 0° and 70° respectively.The calculation results are compared with experimental results.
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