Effect of femtosecond laser parameters on micromachining process

YU Hai-juan; LI Gang; CHEN Meng; ZHANG Bing-yuan

The research of material processing with femtosecond laser has been performed in many countries.The development of many kinds of material processing with femtosecond laser in the world is introduced and the optical parameters'effect on the micromahining process is analyzed.

Corresponding author: LI Gang, lig@biut.edu.cn;

1. College of Laser Engineering, Beijing University of Technology, Beijing 100022, China;

2. College of Physics Science and Information Engineering, Liaocheng University, Liaocheng 252059, China

Received Date: 2004-04-30

Accepted Date: 2004-06-21

Available Online: 2005-05-25

Abstract: The research of material processing with femtosecond laser has been performed in many countries.The development of many kinds of material processing with femtosecond laser in the world is introduced and the optical parameters'effect on the micromahining process is analyzed.

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Reference (13)

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Effect of femtosecond laser parameters on micromachining process

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