Beam homogenizing technology for UV excimer laser
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Shanghai Institute of Optics & Fine Mechanics, the Chinese Academy of Sciences, Shanghai 201800, China;
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2.
School of Graduate, the Chinese Academy of Sciences, Beijing 100039, China
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Corresponding author:
LOU Qi-hong, qhlou@mail.shcnc.ac.cn
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Received Date:
2004-02-09
Accepted Date:
2004-04-15
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Abstract
Limited by characteristic discharging structure and oscillating cavity,the beam energy profile of the excimer laser appears asymmetrically.The principles of various types of beam homogenizer,as well as specifications scaling the beam uniformity are presented.The pro-and-cons of these different technologies and their different valid applications are also discussed.
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References
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[1]
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LOU Q H,HUO Y Sh.Lifetime study of a transverse flow excimer laser[J].Atca Optica Sinica,1987,7(6):481～485. |
|
[2]
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DONG J X,YE Zh H,GAO H Y et al.Improvement of the intensity of excimer laser[J].Chinese J Lasers,1995,A22(12):894～896. |
|
[3]
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GAO H Y,LOU Q H,DONG J X et al.Beam homogenizer for XeCl laser and its applications[J].Atca Optica Sinica,1996,16(1):1379～1382. |
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[4]
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LI H X,LOU Q H,DONG J X et al.A Noval homogenizer to improve the excimer laser beam uniformity[J].Chinese J Lasers,2004,31(7):785～788. |
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[5]
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LI Ch D,CHEN T,ZUO T Ch et al.Design of fly's eye homogenizer for Excimer laser micromachining[J].Chinese J Lasers,1999,A26(6):560～564. |
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[6]
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KLAUMINZER G,ABELE C.Excimer lasers need specifications forbeam uniformity[J].Laser Focus World,1991,27(5):153～158. |
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