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Volume 29 Issue 2
Sep.  2013
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Citation:
shu

The feasibility of measuring grating parameters with the transmission spectrum method

  • 1.

    Department of Physics, Sichuan University, Chengdu 610064, China

  • Corresponding author: FU Ke-xiang, fukexiang168@sina.com ; 
  • Received Date: 2004-02-16
    Accepted Date: 2004-04-15
  • A new method,transmission spectrum method combined the normal simplex algorithm,is proposed to measure the grating parameters.Firstly,the transmission spectrum of the range from 200nm~900nm is obtained according to a certain grating model with the Fourier model method and reflection and tran smission coefficient matrix method (RTCM),based on which the Gaussian noises with different standard deviations are added to it to get the simulated measuring value of transmission spectrum,then five points are gotten respectively from the transmission spectrum with or without Gaussian noises.Secondly,the original supposed value of grating parameters is brought to the estimating function.Through repeatedly computing with the normal simplex algorithm,the grating parameters are obtained.
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  • [1] 罗玉西,田晓晖.测量光栅常数和波长的一种新办法[J].延安大学学报,1999,18(4):41～46.
    [2] 高思田,王春艳,叶孝佑.纳米技术与纳米计量[J].现代计量测试,2000(1):3～12.
    [3] 卢向东,傅克祥,王植恒.椭偏法测光栅参数的可行性理论研究[J].激光杂志,2003,24(1):29～31.
    [4] 茨本俊秀,福岛雅夫.最优化方法[M].北京:世界图书出版公司,1997.4～35.
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    LI L F.Use of Fourier series in the analysis of discontinuous periodic structures[J].J O S A,1996,A13(9):1870～1876.
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    FU K X,WANG Zh H,ZHANG D Y.A modal theory and recursion RTCM algorithm for gratings of deep grooves and arbitrary profile[J]. Science in China,1999,42(6):636～645.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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The feasibility of measuring grating parameters with the transmission spectrum method

    Corresponding author: FU Ke-xiang, fukexiang168@sina.com; 
  • 1. Department of Physics, Sichuan University, Chengdu 610064, China
  • Received Date: 2004-02-16
  • Accepted Date: 2004-04-15
  • Available Online: 2005-03-25

Abstract: A new method,transmission spectrum method combined the normal simplex algorithm,is proposed to measure the grating parameters.Firstly,the transmission spectrum of the range from 200nm~900nm is obtained according to a certain grating model with the Fourier model method and reflection and tran smission coefficient matrix method (RTCM),based on which the Gaussian noises with different standard deviations are added to it to get the simulated measuring value of transmission spectrum,then five points are gotten respectively from the transmission spectrum with or without Gaussian noises.Secondly,the original supposed value of grating parameters is brought to the estimating function.Through repeatedly computing with the normal simplex algorithm,the grating parameters are obtained.

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