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Volume 28 Issue 6
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 2004 >  28(6): 595-597

Citation:
shu

Research of integrated optic-electronic sensor

  • 1.

    Institute of Applied Laser Technology, Sichuan University, Chengdu 610065, China

  • Received Date: 2004-01-30
    Accepted Date: 2004-02-19
  • In order to adapt to the development of modern manuf ac ture technology,a noncontact integrated optic-electronic sensor is designed.It combines three common methods:micrometer,roughness-meter and profilometer and can measure micro-displacement,roughness and profile at the same time.It uses an adaptive noise compensation system to eliminate the noise,whose accuracy is similar to each existing single function sensor.
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    ZHOU W D,ZHOU Z F,CHI G C.Investigation of common-path interferometry[J].Opt Engng,1997,36(11):3172～3175.
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    DOWNS M J,McGIVERN W H,FERGUSEN H J.Optical system for measuring the profile of super smooth surface[J].Precision Engineering,1985,7(4):211～215.
    [3]

    HUANG C C.Optical heterodyne profilometer[J].Opt Engng,1984,23(4):365～370.
    [4] 唐朝伟,梁锡昌.表面起伏测量系统中激光三角测量头的设计[J].激光杂志,1993,14(1):30～34.
    [5] 唐文孝,强锡富.用散射光测量光滑金属表面的粗糙度[J].仪器仪表学报,1993,14(4):381～385.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Research of integrated optic-electronic sensor

  • 1. Institute of Applied Laser Technology, Sichuan University, Chengdu 610065, China
  • Received Date: 2004-01-30
  • Accepted Date: 2004-02-19
  • Available Online: 2004-11-25

Abstract: In order to adapt to the development of modern manuf ac ture technology,a noncontact integrated optic-electronic sensor is designed.It combines three common methods:micrometer,roughness-meter and profilometer and can measure micro-displacement,roughness and profile at the same time.It uses an adaptive noise compensation system to eliminate the noise,whose accuracy is similar to each existing single function sensor.

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