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Volume 27 Issue 5
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 2003 >  27(5): 480-483

Citation:
shu

Simulating uniformity of film thickness with finite-elements method

  • 1.

    College of Electronics Information, Sichuan University, Chengdu, 610064;

  • 2.

    Southwest Institute of Technical Physics, Chengdu, 610041

  • Received Date: 2003-01-07
    Accepted Date: 2003-05-23
  • In this paper,finite-elements method is used to simulate the film thickness uniformity at different rotation and different time. The result shows that the uniformity of film thickness can be improved if the rotation and time are selected properly.
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  • [1] 顾培夫.薄膜技术.杭州:浙江大学出版社,1990:131～145.
    [2] 杨邦朝,王文生.薄膜物理与技术.成都:电子科技大学出版社,1994:25～35.
    [3] 阴晓俊,费书国,章月州 et al.光学仪器,2001,12(23):5～10.
    [4] 小泉达也,孙大雄,范滨.光学仪器,2001,12(23):5～6.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Simulating uniformity of film thickness with finite-elements method

  • 1. College of Electronics Information, Sichuan University, Chengdu, 610064;
  • 2. Southwest Institute of Technical Physics, Chengdu, 610041
  • Received Date: 2003-01-07
  • Accepted Date: 2003-05-23
  • Available Online: 2003-09-25

Abstract: In this paper,finite-elements method is used to simulate the film thickness uniformity at different rotation and different time. The result shows that the uniformity of film thickness can be improved if the rotation and time are selected properly.

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