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Volume 26 Issue 2
Sep.  2013
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Citation:
shu

Micropatterns on polymers etched by excimer lasers

  • 1.

    Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai, 201800

  • Received Date: 2000-11-27
    Accepted Date: 2001-03-28
  • In the paper,the experiment with UV excimer laser etching PI for micropatterns is described in detail.With this method,micropatterns with micron scale line width and sub micron depth have been successfully fabricated on PI.
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  • [1]

    Wang X M,Leger J R. Appl Opt,1997,36(20):4660～4665.
    [2]

    Behrmann G P,Duignan M T. Appl Opt,1997,36(20):4666～4674.
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通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Micropatterns on polymers etched by excimer lasers

  • 1. Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai, 201800
  • Received Date: 2000-11-27
  • Accepted Date: 2001-03-28
  • Available Online: 2002-03-25

Abstract: In the paper,the experiment with UV excimer laser etching PI for micropatterns is described in detail.With this method,micropatterns with micron scale line width and sub micron depth have been successfully fabricated on PI.

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