Research of laser scanning phase edge measurement
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Received Date:
2000-07-14
Accepted Date:
2000-10-09
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Abstract
The system precision is directly affected by the sample edge measurement precision in laser scanning measuring technology.A new method is proposed to detect the edge through modulating scanning laser beam and picking up the phase reversal of the detection signal as the edge signal.Based on the method,the edge measurement precision can be improved less than one micron.
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