Research of thin film infrared detector
- Received Date: 1998-01-19
- Available Online: 1999-03-25
Abstract: The thermal couples are useful detector in laser power or energy measurement or other areas.Now,we developed a novel thin film thermal couple detector deposited on high thermal conductive substrate.This paper described the manufacture parameters and the effects of construction on the response index,response time and noise of the thin film thermal couple detector.