Advances in deposition techniques of laser-assisted solid state thin film

Song Dengyuan

This atticle reviews recent advances in deposition technique of laser-assisted solid state thin films.The basic principles, deposition systems and laser sources of pulsed laser evaporation deposition(PLED) and laser-induced chemical vapor deposition(LCVD) are simply introduce.Applications of this technique in preparing the thin films,such as high-T.superconductive films,metallic films,semi-conductive films and insulation films,used in microelectronic elements are thoroughly presented.

1. Department of Electronics, Hebei University

Received Date: 1990-08-17

Available Online: 1991-09-25

Abstract: This atticle reviews recent advances in deposition technique of laser-assisted solid state thin films.The basic principles, deposition systems and laser sources of pulsed laser evaporation deposition(PLED) and laser-induced chemical vapor deposition(LCVD) are simply introduce.Applications of this technique in preparing the thin films,such as high-T.superconductive films,metallic films,semi-conductive films and insulation films,used in microelectronic elements are thoroughly presented.

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Reference (32)

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Advances in deposition techniques of laser-assisted solid state thin film

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References

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