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Volume 15 Issue 4
Sep.  2013
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Synthesizing amorphous Si3N4 powders by laser

  • Received Date: 1990-06-19
  • The experiment of synthesizing superfine Si3N4 powder by using the CW CO2 laser to irradiate the fast flowing gases (SiH4+NH3) is described.The effect of the laser spectrum variation on the synthesis reaction has been revealed.The deformation phenomenon of the infrared absorption spectrum of the powder has been discovered.
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  • [1]

    Li Daohuo.Matching and optimizing of the experimental parameters for synthesis of Si3N4 by laser,1987 International Laser Science Conference(ILS-Ⅲ).Atlantic USA,Nov.1987.
    [2] 李道火,赵秉纯,赵华珍et al.激光合Si3N4粉末.中国激光,1986;13(9):523.

    [3]

    John S Haggerty.Sinterable ceramic powders from laser heated gas reaction and solidified ceramic materials.MIT-EL-84-009,AD A144439,July 1984
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Synthesizing amorphous Si3N4 powders by laser

  • 1. Anhui Institute of Optics and Fine Mechanics, Academic Sinica

Abstract: The experiment of synthesizing superfine Si3N4 powder by using the CW CO2 laser to irradiate the fast flowing gases (SiH4+NH3) is described.The effect of the laser spectrum variation on the synthesis reaction has been revealed.The deformation phenomenon of the infrared absorption spectrum of the powder has been discovered.

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