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Volume 11 Issue 3
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 1987 >  11(3): 11-17

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The preliminary application of the quartz crystal monitor to infrared coating

  • 1.

    Southwest Institute of Technical Physics

  • Received Date: 1986-11-17
  • The preliminary experiments using the model SF-3A quartz crystal monitor for infrared coating are described.SF-3A monitor is feasible as a film thickness monitor,and the resulting results are consistent with the calculation and similar with optical monitoring.
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  • [1] 《SF-3 A型石英晶体膜厚监控仪》,兰州物理所出版.
    [2] 薛大同、魏向荣,蒸发镀膜的精细监测(内部资料).
    [3] 周九林、尹树百编译,《光学薄膜技术》,国防工业出版社,1974年.
    [4] 《红外光学手册》,国外红外与激光技术编辑组,1973年.
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通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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The preliminary application of the quartz crystal monitor to infrared coating

  • 1. Southwest Institute of Technical Physics
  • Received Date: 1986-11-17
  • Available Online: 1987-05-25

Abstract: The preliminary experiments using the model SF-3A quartz crystal monitor for infrared coating are described.SF-3A monitor is feasible as a film thickness monitor,and the resulting results are consistent with the calculation and similar with optical monitoring.

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