用于半导体退火的微处理器控制激光扫描系统
- Available Online: 1982-11-25
Abstract:
ISSN 1001-3806 CN 51-1125/TN Map
Citation: |
[1] | Baeri,P.et al.,J, A, P.,1979, Vol.50,P.788. |
[2] | Campisano, S, U, et al.,J, A, P.,1980, Vol.51.P.1. |
[3] | Robin:on, A, L.,Science, 1978,Vol.201,P.333. |
[4] | Gat,A.,Gibbons, J, F.,A, P.L.,1978,Vol.32, P.142. |
[5] | Private communication(Quantronics Corp,225 Engineers Road,Smithtown, NY 11787, USA). |
[6] | Gat, A.,CW laser annealing of ion-implanted single crystal silicon(Centre for Laser Annealing, California, 1979). |
[7] | Montagu, J.,Laser Scanning Compts Tech, 1976, Vol.84,P.41. |
[8] | Reich, S.,Laser Scanning Compts Tech, 1976,Vol.84,P.47. |
[9] | M6800 microprocessor application manual, second edition(Motorola Inc,1975). |
Abstract: