用扩展电阻法测量杂质分布
- Available Online: 1979-03-25
Abstract:
ISSN 1001-3806 CN 51-1125/TN Map
Citation: |
[1] | D.H.Dickey, Operating Instruction Manual For Automatic Spreading Resistance probe, ASR-100, A-1 |
[2] | P.A.Schumann, Jr.,and E.E.Garder J.Electrochem, Soc.,S olid State Science, 116, 1,(1969) |
[3] | H.E.Schiott, Can, J, Phys.46,449 (1968)译自《信学技报》(日)vol.76,No.30, SSD76-13.1976, 5, pp.57-66 |
Abstract: