Research of water jet-laser complex etching of ceramics

XIE Bingbing; YUAN Genfu

doi:10.7510/jgjs.issn.1001-3806.2016.05.030

In order to improve the problems that the bad morphologies are very bad in the process of laser direct etching, the method of water jet-laser complex etching was adopted. With SiC composite ceramics and Al2O3 ceramics as studying object materials, the etched morphologies of different componential ceramics with or without water jet were analyzed. On this basis, the effects of velocity of water jet on the etched depth and removal amount were studied. The results show that in the process of laser direct etching, a large amount of slag is attached to the etched surface, the etched morphologies are very bad, more than 60% of SiC composite ceramics are directly decomposed, the slag is less, so the morphology is better than Al2O3 ceramics slightly. In the process of water jet-laser complex etching, the etched morphologies are both turned better, and the morphology when velocity of water jet is 24m/s is better than that when 16m/s. The velocity of water jet is bigger, the etched depth and removal amount are smaller. The velocity of water jet increases every 2m/s, the removal amount reduces by an average of about 0.066mm3. In the case of the same velocity of water jet, the removal amount of SiC composite ceramics is about 0.4mm3, bigger than Al2O3 ceramics. This study is helpful to improve the etched morphologies and analyze the etched mechanism of different ceramics.

Research of water jet-laser complex etching of ceramics

Corresponding author: YUAN Genfu, forygf@263.net

1. School of Mechanical Engineering, Jiangnan University, Wuxi 214122, China

Received Date: 2015-06-18

Accepted Date: 2015-07-20

Available Online: 2016-09-25

Abstract: In order to improve the problems that the bad morphologies are very bad in the process of laser direct etching, the method of water jet-laser complex etching was adopted. With SiC composite ceramics and Al2O3 ceramics as studying object materials, the etched morphologies of different componential ceramics with or without water jet were analyzed. On this basis, the effects of velocity of water jet on the etched depth and removal amount were studied. The results show that in the process of laser direct etching, a large amount of slag is attached to the etched surface, the etched morphologies are very bad, more than 60% of SiC composite ceramics are directly decomposed, the slag is less, so the morphology is better than Al2O3 ceramics slightly. In the process of water jet-laser complex etching, the etched morphologies are both turned better, and the morphology when velocity of water jet is 24m/s is better than that when 16m/s. The velocity of water jet is bigger, the etched depth and removal amount are smaller. The velocity of water jet increases every 2m/s, the removal amount reduces by an average of about 0.066mm3. In the case of the same velocity of water jet, the removal amount of SiC composite ceramics is about 0.4mm3, bigger than Al2O3 ceramics. This study is helpful to improve the etched morphologies and analyze the etched mechanism of different ceramics.

HTML

Reference (15)

[1]	ZHANG X H,AN Y M,HAN J C,et al.Graphene nanosheet reinforced ZrB2-SiC ceramic composite by thermal reduction of graphene oxide[J].RSC Advances,2015,5(58):47060-47065.
[2]	XIE Y P,CHENG L F,MEI H,et al.Effect of SiC Particles on mechanical properties of laminated (SiCw+SiCp)/SiC ceramic composites[J].International Journal of Applied Ceramic Technology,2015,12(3):535-541.
[3]	JING Y N,DENG X Y,LI J B,et al.Fabrication and properties of SiC/mullite composite porous ceramics[J].Ceramics International,2014,40(8):1329-1334.
[4]	RAK Z S.A process for Cf/SiC composites using liquid polymer infiltration[J].Journal of the American Ceramic Society,2001,84(10):2235-2239.
[5]	WU X F,WANG Y,ZHANG H Z.Experimental research on laser assisted machining of Silicon Nitride ceramics[J].Journal of Astronautics,2010,31(5):1457-1462(in Chinese).
[6]	ZHANG X F,YU G Q,JIANG L W.Application of alumina ceramic[J].Foshan Ceramic,2010,20(2):38-43(in Chinese).
[7]	YUAN G F,ZENG X Y.Laser forming research on brittle inorganic materials and the application status[J].LaserOptoelectronics Progress,2002,39(6):47-51(in Chinese).
[8]	LING L,LOU Q H,LI S Z,et al.Microcutting Si wafer in water bath by second harmonic output of YAG laser[J].Laser Technology,2004,28(2):132-134(in Chinese).
[9]	YUAN G F,YAO Y S,CHEN X H,et al.Experimental study on the quality of material surface applied laser-chemical combined etching[J].Chinese Journal of Lasers,2010,37(1):281-283(in Chinese).
[10]	VASS C,OSVAY K,CSETE M,et al.Fabrication of 550nm gratings in fused silica by laser induced backside wet etching technique[J].Applied Surface Science,2007,253(19):8059-8063.
[11]	QIAO Ch R.Development of EDM/Laser compound precision fine machining system[J].Manufacturing TechnologyMachine Tool,2004,17(2):46-50(in Chinese).
[12]	KONG L R,ZHANG F,DUAN J,et al.Research of water-assisted laser etching of alumina ceramics[J].Laser Technology,2014,38(3):330-334(in Chinese).
[13]	LONG Y H,XIONG L C,SHI T L.Experimental research of micromachining silicon by excimer laser ablation in air and under water[J].Laser Technology,2006,30(6):567-569(in Chinese).
[14]	TAN Y L.Water jet guided laser technology[J].Superhard Material Gineering,2013,25(3):47-50(in Chinese).
[15]	PORTER J A,LOUHISALMI A,KARJALAINEN J A,et al.Cutting thin sheet metal with a water jet guided laser using various cutting distances,feed speeds and angles of incidence[J].The International Journal of Advanced Manufacturing Technology,2007,33(9/10):961-967.

Research of water jet-laser complex etching of ceramics

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views