Study on large scale 3-D laser dynamic scanning manufacturing systems
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Wuhan National Laboratory for Optoelectronics, Huazhong University of Science & Technology, Wuhan 430074, China
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Corresponding author:
DUAN Jun, duans@hust.edu.cn
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Received Date:
2015-05-07
Accepted Date:
2015-06-17
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Abstract
In order to meet the requirements of increasing precision, processing size and processing efficiency of 3-D laser micromachining, after theoretical analysis and calculation, a dynamic focusing system was designed combining the dynamic focusing lens with the 2-D galvanometer scanning system. A large scale 3-D laser dynamic focusing scanning processing system was proposed with the combination of the dynamic focusing system and a high precision X-Y-Z 3-D working stage. Telecentric f- lens was designed with focal length of 100mm, field angle of 15, aperture size of 7mm, back focal length of 137mm and relative distortion of less than 0.5%. And a dynamic focusing system was designed with aperture size of 8mm, optical leverage ratio of 1:8 and back focal length of 800mm40mm. ZEMAX was used to analyze and evaluate the optical design and system performance of the dynamic focusing lens and telecentric f- lens. The results show that, after layer stitching with the process control software, large-scale (460mm310mm50mm) 3-D dynamic focusing precision UV laser micromachining system is achieved. In 3-D scanning range, laser beam spot diameter remains always less than 10m and meets the needs of large-scale 3-D precision laser micromachining.
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