Model of scattering measurement for 1-D micro- and nano-periodic structure

SHANG Hai; DANG Xueming

doi:10.7510/jgjs.issn.1001-3806.2016.02.021

In order to study the forward measurement principle of scattering measurement, the diffraction model of 1-D periodic rectangular structure was made by rigorous coupled-wave analysis (RCWA) algorithm and programmed by MATLAB. Measurement characteristics of height, linewidth and duty cycle for 1-D periodic structure were thoroughly discussed. In theory, the measurement resolution of linewidth could achieve nanometer level. The results show that RCWA algorithm could achieve accurate and efficient purpose and its good measurement properties for 1-D periodic micro-and nano-structure provide a scientific and feasible basis for scattering measurement.

Model of scattering measurement for 1-D micro- and nano-periodic structure

Corresponding author: DANG Xueming, dangxm@ustc.edu

1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China

Received Date: 2015-01-07

Accepted Date: 2015-03-06

Available Online: 2016-03-25

Abstract: In order to study the forward measurement principle of scattering measurement, the diffraction model of 1-D periodic rectangular structure was made by rigorous coupled-wave analysis (RCWA) algorithm and programmed by MATLAB. Measurement characteristics of height, linewidth and duty cycle for 1-D periodic structure were thoroughly discussed. In theory, the measurement resolution of linewidth could achieve nanometer level. The results show that RCWA algorithm could achieve accurate and efficient purpose and its good measurement properties for 1-D periodic micro-and nano-structure provide a scientific and feasible basis for scattering measurement.

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Reference (15)

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Model of scattering measurement for 1-D micro- and nano-periodic structure

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