Study on expansion characteristics of tin plasma plume produced by CO2 laser and Nd:YAG laser

YANG Ruoqi; WANG Xinbing; LAN Hui

doi:10.7510/jgjs.issn.1001-3806.2016.02.015

In order to study effect of laser on extreme ultraviolet (EUV) plasma debris, CO2 and Nd:YAG pulsed laser was used to produced Sn plasma. Based on direct imaging method, expansion characteristics of plasma plume at low pressure were studied. 2-D pictures of Sn plume were taken directly by intensified charge coupled device (ICCD) and plasma boundary was determined. The time-dependant variation of plasma plume expansion boundary at different angles and the variation of kinetic energy with the change of motion path were calculated. The results show that under the same laser energy density of 2.5106 mJ/cm2 and the atmosphere pressure of 10Pa, EUV Sn plasma kinetic energy produced by Nd:YAG laser is greater than that produced by CO2 laser. CO2 laser is superior to Nd:YAG laser for decreasing plasma debris. This result is helpful for the application of laser plasma.

Study on expansion characteristics of tin plasma plume produced by CO2 laser and Nd:YAG laser

Corresponding author: WANG Xinbing, xbwang@mail.hust.edu.cn;

1. Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China;

2. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

Received Date: 2015-01-30

Accepted Date: 2015-04-02

Available Online: 2016-03-25

Abstract: In order to study effect of laser on extreme ultraviolet (EUV) plasma debris, CO2 and Nd:YAG pulsed laser was used to produced Sn plasma. Based on direct imaging method, expansion characteristics of plasma plume at low pressure were studied. 2-D pictures of Sn plume were taken directly by intensified charge coupled device (ICCD) and plasma boundary was determined. The time-dependant variation of plasma plume expansion boundary at different angles and the variation of kinetic energy with the change of motion path were calculated. The results show that under the same laser energy density of 2.5106 mJ/cm2 and the atmosphere pressure of 10Pa, EUV Sn plasma kinetic energy produced by Nd:YAG laser is greater than that produced by CO2 laser. CO2 laser is superior to Nd:YAG laser for decreasing plasma debris. This result is helpful for the application of laser plasma.

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Reference (16)

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Study on expansion characteristics of tin plasma plume produced by CO2 laser and Nd:YAG laser

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