Study on surface structure of lithium niobate crystal induced by femtosecond laser based on thermal effect
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Corresponding author:
ZHOU Zigang, zhouzigang1973@163.com
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Received Date:
2014-08-11
Accepted Date:
2015-01-17
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Abstract
In order to study thermal effect of femtosecond laser on the surface of LiNbO3 crystal, LiNbO3 crystal surface was etched by tightly-focused femtosecond laser pulses with repetition rate of 25MHz, pulse duration of 100fs and average output power of 500mW. A theoretical thermal diffusion model was built to simulate the temperature filed distribution of the area etched by laser pulses with repetition rate of 25MHz, and the morphology of the etched area was analyzed by a scanning electron microscope. There were three regions with different sizes and densities from the inside to the outside of the etched area, and the central region was ablated by high temperature and was accompanied with the appearance of cracks. Relative contents of Nb and O at the three regions were measured by using energy dispersive spectroscopy and were analyzed with temperature field distribution and morphology. The result shows that Nb and O elements spread out under the drive of temperature field, and relative contents of Nb and O have an important influence on surface structure of etch area. The results are useful for mechanism research of the interaction between high repetition rate femtosecond laser and LiNbO3 crystal.
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