Generation of azimuthally polarized beam based on hybrid grating mirror

LU Lijuan; LI Bo; WANG Youqing; ZHAO Jiang

doi:10.7510/jgjs.issn.1001-3806.2015.05.001

Volume 39 Issue 5

Jul. 2015

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Generation of azimuthally polarized beam based on hybrid grating mirror

1.
National Engineering Research for Laser Processing, Huazhong University of Science and Technology, Wuhan 430074, China

Corresponding author: LI Bo, libohust@gmail.com ;
Received Date: 2014-09-02
Accepted Date: 2014-10-29

Abstract

To achieve azimuthally polarized beam, hybrid grating mirror was designed based on rigorous coupled wave analysis method. At first, amorphous Ge grating with high depth-to-width ratio was obtained by studying the etching characteristics of pseudo Bosch process on Ge grating. And then, dielectric-metal hybrid grating mirror was obtained after the randomly distributed Ge nanoneedle was introduced at the bottom of gate groove, and gold film and dielectric protective film were coated in turn. Finally, 550W azimuthally polarized beam was generated when hybrid grating mirror was used as the rear mirror of a fast axial flow CO2 laser. The results show that hybrid grating mirror has high polarization selectivity because of the introduction of nano-pillars as well as gold ridge.
- laser technique,
- azimuthally polarized beam,
- rigorous coupled wave analysis,
- hybrid grating mirror,
- pseudo Bosch process,
- nano-pillar,
- gold ridge

References

[1]	LUO K, QIAN S, WANG X, et al. Two-dimensional microstructures induced by femtosecond vector light fields on silicon[J]. Optics Express, 2012, 20(1):120-127.
[2]	FATEMI F K, BASHKANSKY M, OH E, et al. Efficient excitation of the TE01 hollow metal waveguide mode for atom guiding[J]. Optics Express, 2010, 18(1):323-332.
[3]	SCHEUER J. Ultra-high enhancement of the field concentration in split ring resonators by azimuthally polarized excitation[J]. Optics Express, 2011, 19(25):25454-25464.
[4]	WEBER R, MICHALOWSKI A, AHMED M A, et al. Effects of radial and tangential polarization in laser material processing[J].Physics Procedia, 2011, 12(A):21-30 .
[5]	MEIER M, ROMANO V, FEURER T. Material processing with pulsed radially and azimuthally polarized laser radiation[J]. Applied Physics, 2007, A86(3):329-334.
[6]	GROSJEAN T, COURJON D, SPAJER M. An all-fiber device for generating radially and other polarized light beams[J]. Optics Communications, 2002, 203(1/2):1-5.
[7]	YIRMIYAHU Y, NIV A, BIENER G, et al. Excitation of a single hollow waveguide mode using inhomogeneous anisotropic subwavelength structures[J]. Optics Express, 2007, 15(20): 13404-13414.
[8]	STALDER M, SCHADT M. Linearly polarized light with axial symmetry generated by liquid-cystal polarization converters[J]. Optics Letters, 1996, 21(23):1948-1950.
[9]	MACHAVARIANI G, LUMER Y, MOSHE I, et al. Efficient extracavity generation of radially and azimuthally polarized beams[J]. Optics Letters, 2007, 32(11):1468-1470.
[10]	MA P, ZHOU P, MA Y, et al. Generation of azimuthally and radially polarized beams by coherent polarization beam combination[J]. Optics Letters, 2012, 37(13): 2658-2660.
[11]	NIZIEV V G, YAKUNIM V P, TURKIN N G. Generation of polarisation-nonuniform modes in a high-power CO2 laser[J].Quantum Electronics, 2009, 39(6):505-514.
[12]	RUMPEL M, HAEFNER M, SCHODER T, et al. Circular grating waveguide structures for intracavity generation of azimuthal polarization in a thin-disk laser[J]. Optics Letters, 2012, 37(10):1763-1765.
[13]	KMPFE T, TONCHEV S, TISHCHENKO A V, et al. Azimuthally polarized laser mode generation by multilayer mirror with wideband grating-induced TM leakage in the TE stopband[J]. Optics Express, 2012, 20(5):5392-5401 .
[14]	PARK S, Di GIACOMO S J, ANISHA R, et al. Fabrication of nanowires with high aspect ratios utilized by dry etching with SF6:C4F8 and self-limiting thermal oxidation on Si substrate[J]. Vacuum Science and Technology, 2010,B28(4):763-768.
[15]	HECHT E, ZAJAC A. Optics[M]. 4th ed. San Francisco, California,USA: Addison-Wesley,2002:226-227.
[16]	NIKLASSON G A, GRANQVIST C G, HUNDERI O. Effective medium models for the optical properties of inhomogeneous materials[J]. Applied Optics, 1981, 20(1):26-30.
[17]	CHEN H, LIU H, WU C, et al. Gallium nitride nanorod arrays as low-refractive-index transparent media in the entire visible spectral region[J].Optics Express, 2008, 16(11):8106-8116.
[18]	ORDAL M A, LONG L L, BELL R J, et al. Optical properties of the metals Al, Co, Cu, Au, Fe, Pb, Ni, Pd, Pt, Ag, Ti, and W in the infrared and far infrared[J]. Applied Optics, 1983, 22(7):1099-1120.
[19]	MOHARAM M G, GAYLORD T K. Rigorous coupled-wave analysis of grating diffraction[J]. Journal of the Optical Society of America, 1981, 71(7):811-818.
[20]	MOHARAM M G, GAYLORD T K. Diffraction analysis of dielectric surface-relief grating[J]. Journal of the Optical Society of America, 1982, 72(10):1385-1392.
[21]	XU M, URBACH H P, de BOER D K G, et al. Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon[J].Optics Express, 2005,13(7): 2303-2320.
[22]	KIM T S, YANG H Y, KIL Y H, et al. Inductively-coupled BCl3/O2 plasma etching of germanium[J]. Korean Physical Society, 2009, 55(5):1799-1802.
[23]	YU X J, KWOK H S. Optical wire-grid polarizers at oblique angles of incidence[J].Journal of Applied Physics, 2003, 93(8):4407-4412.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Generation of azimuthally polarized beam based on hybrid grating mirror

Corresponding author: LI Bo, libohust@gmail.com;

1. National Engineering Research for Laser Processing, Huazhong University of Science and Technology, Wuhan 430074, China

Received Date: 2014-09-02

Accepted Date: 2014-10-29

Available Online: 2015-09-25

Abstract: To achieve azimuthally polarized beam, hybrid grating mirror was designed based on rigorous coupled wave analysis method. At first, amorphous Ge grating with high depth-to-width ratio was obtained by studying the etching characteristics of pseudo Bosch process on Ge grating. And then, dielectric-metal hybrid grating mirror was obtained after the randomly distributed Ge nanoneedle was introduced at the bottom of gate groove, and gold film and dielectric protective film were coated in turn. Finally, 550W azimuthally polarized beam was generated when hybrid grating mirror was used as the rear mirror of a fast axial flow CO2 laser. The results show that hybrid grating mirror has high polarization selectivity because of the introduction of nano-pillars as well as gold ridge.

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Reference (23)

[1]	LUO K, QIAN S, WANG X, et al. Two-dimensional microstructures induced by femtosecond vector light fields on silicon[J]. Optics Express, 2012, 20(1):120-127.
[2]	FATEMI F K, BASHKANSKY M, OH E, et al. Efficient excitation of the TE01 hollow metal waveguide mode for atom guiding[J]. Optics Express, 2010, 18(1):323-332.
[3]	SCHEUER J. Ultra-high enhancement of the field concentration in split ring resonators by azimuthally polarized excitation[J]. Optics Express, 2011, 19(25):25454-25464.
[4]	WEBER R, MICHALOWSKI A, AHMED M A, et al. Effects of radial and tangential polarization in laser material processing[J].Physics Procedia, 2011, 12(A):21-30 .
[5]	MEIER M, ROMANO V, FEURER T. Material processing with pulsed radially and azimuthally polarized laser radiation[J]. Applied Physics, 2007, A86(3):329-334.
[6]	GROSJEAN T, COURJON D, SPAJER M. An all-fiber device for generating radially and other polarized light beams[J]. Optics Communications, 2002, 203(1/2):1-5.
[7]	YIRMIYAHU Y, NIV A, BIENER G, et al. Excitation of a single hollow waveguide mode using inhomogeneous anisotropic subwavelength structures[J]. Optics Express, 2007, 15(20): 13404-13414.
[8]	STALDER M, SCHADT M. Linearly polarized light with axial symmetry generated by liquid-cystal polarization converters[J]. Optics Letters, 1996, 21(23):1948-1950.
[9]	MACHAVARIANI G, LUMER Y, MOSHE I, et al. Efficient extracavity generation of radially and azimuthally polarized beams[J]. Optics Letters, 2007, 32(11):1468-1470.
[10]	MA P, ZHOU P, MA Y, et al. Generation of azimuthally and radially polarized beams by coherent polarization beam combination[J]. Optics Letters, 2012, 37(13): 2658-2660.
[11]	NIZIEV V G, YAKUNIM V P, TURKIN N G. Generation of polarisation-nonuniform modes in a high-power CO2 laser[J].Quantum Electronics, 2009, 39(6):505-514.
[12]	RUMPEL M, HAEFNER M, SCHODER T, et al. Circular grating waveguide structures for intracavity generation of azimuthal polarization in a thin-disk laser[J]. Optics Letters, 2012, 37(10):1763-1765.
[13]	KMPFE T, TONCHEV S, TISHCHENKO A V, et al. Azimuthally polarized laser mode generation by multilayer mirror with wideband grating-induced TM leakage in the TE stopband[J]. Optics Express, 2012, 20(5):5392-5401 .
[14]	PARK S, Di GIACOMO S J, ANISHA R, et al. Fabrication of nanowires with high aspect ratios utilized by dry etching with SF6:C4F8 and self-limiting thermal oxidation on Si substrate[J]. Vacuum Science and Technology, 2010,B28(4):763-768.
[15]	HECHT E, ZAJAC A. Optics[M]. 4th ed. San Francisco, California,USA: Addison-Wesley,2002:226-227.
[16]	NIKLASSON G A, GRANQVIST C G, HUNDERI O. Effective medium models for the optical properties of inhomogeneous materials[J]. Applied Optics, 1981, 20(1):26-30.
[17]	CHEN H, LIU H, WU C, et al. Gallium nitride nanorod arrays as low-refractive-index transparent media in the entire visible spectral region[J].Optics Express, 2008, 16(11):8106-8116.
[18]	ORDAL M A, LONG L L, BELL R J, et al. Optical properties of the metals Al, Co, Cu, Au, Fe, Pb, Ni, Pd, Pt, Ag, Ti, and W in the infrared and far infrared[J]. Applied Optics, 1983, 22(7):1099-1120.
[19]	MOHARAM M G, GAYLORD T K. Rigorous coupled-wave analysis of grating diffraction[J]. Journal of the Optical Society of America, 1981, 71(7):811-818.
[20]	MOHARAM M G, GAYLORD T K. Diffraction analysis of dielectric surface-relief grating[J]. Journal of the Optical Society of America, 1982, 72(10):1385-1392.
[21]	XU M, URBACH H P, de BOER D K G, et al. Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon[J].Optics Express, 2005,13(7): 2303-2320.
[22]	KIM T S, YANG H Y, KIL Y H, et al. Inductively-coupled BCl3/O2 plasma etching of germanium[J]. Korean Physical Society, 2009, 55(5):1799-1802.
[23]	YU X J, KWOK H S. Optical wire-grid polarizers at oblique angles of incidence[J].Journal of Applied Physics, 2003, 93(8):4407-4412.

Generation of azimuthally polarized beam based on hybrid grating mirror

Abstract

References

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通讯作者: 陈斌, bchen63@163.com

Proportional views