Study on optical coherence tomography detection of ZnO film
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Received Date:
2013-11-06
Accepted Date:
2013-11-11
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Abstract
In order to measure the thickness of ZnO film, optical coherence tomography (OCT) technique was used for theoretic analysis and experimental verification. The 1-D depth image including thickness information and the 2-D cross-sectional image including structure information were obtained simultaneously. The results show that the measuring result is almost as same as the theoretical value. It is illustrated that the measurement of the spectral-domain OCT is real and effective. It can be used for the measurement of thickness and quality of the film.
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