Design of free-form f- lens in polygonal mirror laser scanning system
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Department of Opto-electronics Information Engineering, College of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
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Received Date:
2013-11-22
Accepted Date:
2013-11-29
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Abstract
In order to satisfy the need of high resolution, large operation area and miniaturization of the scanning system, one f- lens with super wide angle and diffraction-limited focusing performance was designed. On this basis, the resolution reduction and the linear distortion increasing caused by the pupil deviation due to the polygonal mirror were analyzed. After calculation, it was found that the pupil deviation had an aspheric nonlinear relationship with the scanning angle. Using the higher order terms of free surfaces to correct the deviation of pupil, the models of polygonal mirror f- scanning system was optimized with ZEMAX and the multiple structures and the practical example was given. Due to the telephoto type of lens, the overall length of the scanning system and the aperture of the lens were effectively reduced. The simulation result shows that the f- performance is significantly improved through optimization and correction. Within the scanning angle of 115, linear distortion is less than 0.5% and 60% of incident light energy is gathered in a circle in 30m radius. The practical f- scanning system has the advantages of compact structure, high resolution and low linear distortion.
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References
|
[1]
|
NGOI B K A, VENKATAKRISHNAN K. Two-axis-scanning laser doppler vibrometer for microstructure[J]. Optics Communication,2000,18(1/3):175-185. |
|
[2]
|
JI Y Q, SHEN W M. Optical design of large working area f-theta lens[J]. Acta Optica Sinica,2005,25(11):1539-1542(in Chinese). |
|
[3]
|
FU M M, CHEN P F, WANG Y, et al. Optical design of super wide angle f-theta lens with large operation area[J]. Journal of Applied Optics,2011,32(6):1083-1087(in Chinese). |
|
[4]
|
PENG L Y, WANG X Y, ZHOU J T, et al. Polynominal fitting correction of galvanometer geometric distortion error in laser marking[J]. Laser Technology, 2013, 37(5):602-604 (in Chinese). |
|
[5]
|
LAIKIN M. Lens design[M].4rd ed. Beijing: China Machine Press, 2011: 143-155(in Chinese). |
|
[6]
|
WANG X J, WU J C, CHEN X X, et al. Design of hybird refractive-diffractive f-lens with multi-wavelength, large working area[J].Infrared and Laser Engineering,2009,38(1):79-81(in Chinese). |
|
[7]
|
FUSE K, OKADA T, EBATA K. Diffractive/refractive hybird f-theta lens for laser drilling of multilayer printed circuit boards[J]. Proceedings of the SPIE,2003,4830:95-100. |
|
[8]
|
ZHANG S Y. Optical design of the f- lens in laser scanning system[D]. Changchun: Changchun University of Science and Technology, 2012: 8-34(in Chinese). |
|
[9]
|
LI D J, LIANG S Y, CAO J J, et al. Spatial laser beam shaping using aspheric Galilean beam expansion system[J]. Laser Technology, 2008, 32(4):427-429(in Chinese). |
|
[10]
|
SMITH W J. Modern optical engineering[M].4rd ed. Beijing: power laser and matter in water Chemical Industry Press, 2011: 98-102(in Chinese). |
|
[11]
|
HU J G, LI X J, ZHANG B G, et al. Study on nonlinearity and asymmetry of polygonal mirror scanning[J]. Opto-Electronic Engineering,2004,31(3):26-28(in Chinese). |
|
[12]
|
HAN W P, MENG W, LI Y X, et al. Correction model mixed with least-square and grid method for dual galvanometric scanning[J]. Laser Technology, 2012, 36(2):179-182(in Chinese). |
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