Study on polishing process of Al2O3 ceramic with 355nm ultraviolet laser
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1.
Faculty of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China
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Corresponding author:
WEI Xin, weixin@gdut.edu.cn
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Received Date:
2013-08-16
Accepted Date:
2013-09-03
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Abstract
Al2O3 ceramic polished with 355nm ultraviolet laser could effectively reduce the heat affected zone in processing and prevent the formation of microcracks. In order to find the effects of different parameters (laser energy intensity,laser scanning velocity,laser scanning interval) on the surface roughness and the surface quality,a series of experiments were carried out with a single factor of the 355nm ultraviolet laser affecting the polishing result. The optimal technology parameters were obtained at last. The results show that relatively small surface roughness can be obtained under the conditions of 6J/cm2 laser fluence,60mm/s laser scanning velocity and 2μm laser scanning interval. The study is helpful for getting low roughness and high quality of Al2O3 ceramic.
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