Study on micro-electromechanical system measurement using optical coherence tomography

QIN Yu-wei

doi:10.7510/jgjs.issn.1001-3806.2013.05.022

In order to measure the structure of V-shaped silicon grooves, a thermal light spectral-domain optical coherence tomography was introduced. After the theoretical analysis and the experimental verification, 1-D depth image and 2-D cross-sectional image of V-shaped silicon grooves were obtained. Depth of 145.38m, top width of 212m and bottom width of 32m were gotten. The measured data was the same as the measured result of scanning electron microscope. The results are helpful for the measurement of micro-electromechanical system.

Study on micro-electromechanical system measurement using optical coherence tomography

1. School of Physics and Electrical Engineering, Weinan Normal University, Weinan 714000, China

Received Date: 2012-11-27

Accepted Date: 2012-12-18

Available Online: 2013-09-25

Abstract: In order to measure the structure of V-shaped silicon grooves, a thermal light spectral-domain optical coherence tomography was introduced. After the theoretical analysis and the experimental verification, 1-D depth image and 2-D cross-sectional image of V-shaped silicon grooves were obtained. Depth of 145.38m, top width of 212m and bottom width of 32m were gotten. The measured data was the same as the measured result of scanning electron microscope. The results are helpful for the measurement of micro-electromechanical system.

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Reference (10)

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Study on micro-electromechanical system measurement using optical coherence tomography

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