Polynomial fitting correction of galvanometer geometric distortion error in laser marking
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1.
School of Physics and Engineering, Zhengzhou University, Zhengzhou 450001, China;
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2.
Luoyang Yonglong Energy Limited Company, Henan Coal Chemical Industry Group, Luoyang 471100, China
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Corresponding author:
PEI Hong-xing, phxlee@zzu.edu.cn
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Received Date:
2012-11-28
Accepted Date:
2013-01-05
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Abstract
In order to eliminate geometric distortion error of marking point caused by 2-D galvanometer scan before the objective in laser marking system, the causes of the distortion was analyzed in detail. On the basis of the ideal formula of galvanometer deflection angle (,), using the least squares curve fitting method, a fitting polynomial for compensating the errors of (,) with the marking point coordinates (x,y) was obtained and the distortion error of the galvanometer laser marking point was corrected. After correction, the maximum geometric distortion error of the laser marking point can be reduced from 3.2mm down to less than 20m with smaller amount of calculation and faster speed. The results show that this error correction algorithm can meet the requirements of high-speed, high-precision laser marking. At the same time, new compensation formula can be calculated by changing the objective lens focal length to be applied to the different parameters laser marking system.
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