Study on energy control algorithm for high-repetition-rate ArF excimer lasers

WANG Xiao-shun; LIANG Xu; YOU Li-bing; ZHAO Jia-min; FANG Xiao-dong

doi:10.3969/j.issn.1001-3806.2012.06.013

In order to achieve the pulse energy stability of high-repetition-rate ArF excimer lasers,the technology of pulse energy control was studied from the perspective of power supply adjustment.The closed-loop control principle for pulse energy stability of high-repetition-rate ArF excimer lasers was introduced.The function model between the output energy of excimer laser and the discharge voltage was established with approximation method,and the proportion-integration(PI) algorithm for real-time adjustment of discharge voltage based on the real-time detection of pulse energy was proposed.combined with the function model and the control algorithm,simulation was carried out with MATLAB software.The simulation results indicate that the pulse energy model is reasonable and the PI algorithm is feasible for improving the laser pulse energy stability.

Study on energy control algorithm for high-repetition-rate ArF excimer lasers

Corresponding author: FANG Xiao-dong, xdfang@aiofm.ac.cn

1. Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

Received Date: 2012-04-06

Accepted Date: 2012-04-11

Available Online: 2012-11-25

Abstract: In order to achieve the pulse energy stability of high-repetition-rate ArF excimer lasers,the technology of pulse energy control was studied from the perspective of power supply adjustment.The closed-loop control principle for pulse energy stability of high-repetition-rate ArF excimer lasers was introduced.The function model between the output energy of excimer laser and the discharge voltage was established with approximation method,and the proportion-integration(PI) algorithm for real-time adjustment of discharge voltage based on the real-time detection of pulse energy was proposed.combined with the function model and the control algorithm,simulation was carried out with MATLAB software.The simulation results indicate that the pulse energy model is reasonable and the PI algorithm is feasible for improving the laser pulse energy stability.

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Reference (14)

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Study on energy control algorithm for high-repetition-rate ArF excimer lasers

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