Film thickness measurement based on optical coherence tomography

QIN Yu-wei

doi:10.3969/j.issn.1001-3806.2012.05.022

A measuring method based on white-light spectral-domain optical coherence tomography was used to measure thin film thickness.The theory was analyzed and the experiment was done.The single-layer and multi-layer thin film on glass substrate was used for imaging experiments respectively and 2-D cross-sectional images were obtained.The experiment shows that system can not only measure the inner microstructure of the film,but also measure the film thickness of single-layer and multi-layer film in 68μm and 30μm respectively.The measured value is the same as the theoretical value,which verifies the validity of the theory.The system has high imaging speed and resolution,and can meet the industrial measurement.

Film thickness measurement based on optical coherence tomography

1. School of Physics and Electrical Engineering, Weinan Teachers University, Weinan 714000, China

Received Date: 2012-01-13

Accepted Date: 2012-02-11

Available Online: 2012-09-25

Abstract: A measuring method based on white-light spectral-domain optical coherence tomography was used to measure thin film thickness.The theory was analyzed and the experiment was done.The single-layer and multi-layer thin film on glass substrate was used for imaging experiments respectively and 2-D cross-sectional images were obtained.The experiment shows that system can not only measure the inner microstructure of the film,but also measure the film thickness of single-layer and multi-layer film in 68μm and 30μm respectively.The measured value is the same as the theoretical value,which verifies the validity of the theory.The system has high imaging speed and resolution,and can meet the industrial measurement.

HTML

Reference (10)

[1]	CHANG Sh D,MAO Y X,COSTEL F,et al.Optical coherence tomography:technology and applications[J].Proceedings of SPIE, 2009,7156:1-8.
[2]	HUANG D,SWANSON E A,LIN C P,et al.Optical coherence tomography[J].Science,1991,254(5035):1178-1181.
[3]	FERCHER A F,DREXLER W,HITZENBERGER C K,et al.Optical coherence tomography-principles and applications[J].Reports on Progress in Physics,2003,66(2):239-303.
[4]	WIESAUER K,PIRCHER M,GOTZINGER E,et al.En-face scanning optical coherence tomography with ultra-high resolution for material investigation[J].Optics Express,2005,13(3):1015-1024.
[5]	CHANG Sh D,MAO Y X,CHANG G M,et al.Jade detection and analysis based on optical coherence tomography images[J].Optical Engineering,2010,49(6):1-6.
[6]	LEITHEB R,HIEZENBERGER C K,FERCHER A F.Performance of fourier domain vs.time domain optical coherence tomography[J]. Optics Express,2003,11(8):889-894.
[7]	de BOER J F,CENSE B,PARK B H,et al.Improved signal-tonoise ratio in spectral-domain compared with time-domain optical coherence tomography[J].Optics Letters,2003,28(21):2067-2069.
[8]	YUN S H,TEARNDY G J,de BOER J F,et al.High-speed optical frequency-domain imaging[J].Optics Express,2003,11(22):2953-2963.
[9]	FERCHER A F,HITZENBERGER C K,KAMP G,et al.Measurement of intraocular distances by backscattering spectral interferometry[J].Optics Communications,1995,117(1/2):443-448.
[10]	TARGOWSKI P,WOJTKOWSKI M,KOWALCZYK A,et al.Complex spectral OCT in human eye imaging in vivo[J].Proceedings of SPIE,2003,5140:28-32.

Film thickness measurement based on optical coherence tomography

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views