Research of laser edge deletion technology of a-Si：H thin film solar cell

WANG Zhong; HE Li; LU Fei-xing

doi:10.3969/j.issn.1001-3806.2011.02.005

In the manufacture of a-Si:H thin film solar cell,sandblasting edge deletion has some disadvantages of pollution and poor conformity.Laser edge deletion was carried out with a 1064nm pulsed fiber laser under the conditions of 3500mm/s scan speed,30W output power,80kHz frequency and 0.05mm line space.The resistance of the specimen was larger than 1000MΩ. The best beam spot overlap ratio was acquired according to the experimental results,and the ratio in x and y direction was 0.83 and 0.88 respectively.It showed that beam spot overlap status influenced deletion efficiency and effect obviously with enough output power.Scan speed should match with frequency and line space to obtain the best processing effect with the optimal efficiency.

Research of laser edge deletion technology of a-Si：H thin film solar cell

1. National Engineering Research Center for Laser Processing, Huazhong University of Science and Technology, Wuhan 430074, China;

2. Wuhan Huagong Laser Engineering Co. Ltd., Wuhan 430223, China

Received Date: 2010-05-10

Accepted Date: 2010-05-31

Available Online: 2011-03-25

Abstract: In the manufacture of a-Si:H thin film solar cell,sandblasting edge deletion has some disadvantages of pollution and poor conformity.Laser edge deletion was carried out with a 1064nm pulsed fiber laser under the conditions of 3500mm/s scan speed,30W output power,80kHz frequency and 0.05mm line space.The resistance of the specimen was larger than 1000MΩ. The best beam spot overlap ratio was acquired according to the experimental results,and the ratio in x and y direction was 0.83 and 0.88 respectively.It showed that beam spot overlap status influenced deletion efficiency and effect obviously with enough output power.Scan speed should match with frequency and line space to obtain the best processing effect with the optimal efficiency.

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Reference (9)

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Research of laser edge deletion technology of a-Si：H thin film solar cell

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