Research of the fabrication of micro channels in a fused silica substrate using laser-induced plasma

FENG Cai-ling; WANG Hai-xu; QIN Shui-jie

doi:10.3969/j.issn.1001-3806.2010.04.001

In order to fabricate high-quality micro channels in a fused silica,the fundamental frequency laser of a Qswitched Nd:YAG laser at 1064nm and the mixing laser composed of 70% second harmonic laser and 30% fundamental frequency laser were used to irradiate a fused silica substrate respectively to induce the plasma,by which micro channels in a fused silica substrate were fabricated.And the reasons for difference between two kinds of processing methods were analyzed.The results show that the interior wall of the channels processed by mixing laser are smoother and its drilling rate is faster than that processed by fundamental frequency.Furthermore,the depth of the channels processed by the mixing laser is up to 8mm.

Research of the fabrication of micro channels in a fused silica substrate using laser-induced plasma

Corresponding author: QIN Shui-jie, sjqin@mail.gzst.gov.cn

1. Key Laboratory of Photoelectron Technology and Application, Guizhou University, Guiyang 550025, China

Received Date: 2009-09-08

Accepted Date: 2009-10-23

Available Online: 2010-07-25

Abstract: In order to fabricate high-quality micro channels in a fused silica,the fundamental frequency laser of a Qswitched Nd:YAG laser at 1064nm and the mixing laser composed of 70% second harmonic laser and 30% fundamental frequency laser were used to irradiate a fused silica substrate respectively to induce the plasma,by which micro channels in a fused silica substrate were fabricated.And the reasons for difference between two kinds of processing methods were analyzed.The results show that the interior wall of the channels processed by mixing laser are smoother and its drilling rate is faster than that processed by fundamental frequency.Furthermore,the depth of the channels processed by the mixing laser is up to 8mm.

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Reference (20)

[1]	BAI Zh Ch,JIANG Ch J,QIN Sh J,et al.A novel fiber optic biosensor based on microchannels fabricated laser[J].Journal of Optoelectronics·Laser,2009,20(5):605-608(in chinese).
[2]	LIN B Ch,QIN J H.Laboratory on a microfluidic chip[J].Chinese Journal of Chromatography,2005,23(5):456-463(in Chinese).
[3]	Shanghai Jiaotong University.A oxygen micro-pump based on decomposition of hydrogen peroxide:China,200510026602[P].2007-05-02(in Chinese).
[4]	PAN J Sh.Microchannel plates and its main characteristics[J].Journal of Applied Optics,2004,25(5):25-28(in Chinese).
[5]	QIN Sh J,LI W J.Analysis of nano channel formation in quartz cubes by laser-induced process[J].Acta Mechanica Sinica,2004,20(2):125-131.
[6]	LI Y,ITOH K,WATANABE W,et al.Three-dimensional hole drilling of silica glass from the rearsurface with femtosecond laser pulses[J].Opt Lett,2001,26(23):1912-1914.
[7]	LIU Q,CHENG G H,WANG Y S,et al.Fabrication of internal diffraction gratings in transparent materials using femtosecond laser[J].Acta Photonica Sinica,2004,33(11):1290-1293(in Chinese).
[8]	ZHAI L B,ZHAO H L,CHEN J M.The microfabrication of microchannel on glass with frequency tripled Nd∶YAG laser[J].Applied Laser,2006,26(6):362-368(in Chinese).
[9]	YOU M,ZHAO W,CHENG G H,et al.Crystallization in PTR glass induced by irradiation of femtosecond lasers[J].Laser Technology,2006,30(1):40-42(in Chinese).
[10]	ZHANG J,SUGIOKA K,MIDORIKAWA K.High-speed machining of glass materials by laser-induced plasma-assisted ablation using a 532nm laser[J].Appl Phys,1998,A67(4):499-501.
[11]	ZHANG J,SUGIOKA K,MIDORIKAWA K.Study of microprocessing of glass materials by laser-induced plasma assisted-ablation using nanosecond pulsed lasers[J].Proc of SPIE,2000,3933:332-337.
[12]	HANADA Y,SUGIOKA K,GOMI Y,et al.Development of practical system for laser-induced plasma-assisted ablation(LIPAA) of micromachining of glass materials[J].Appl Phys,2004,A79(4):1001-1003.
[13]	HANADA Y,SUGIOKA K,MIDORIKAWA K.Laser-induced plasma-assisted ablation (LIPAA):fundamental and industrial applications[J].Proc SPIE,2006,6261:626111.
[14]	QIN SH J,LI W J.Micromachining of complex channel systems in 3-D quartz substrates using Q-switched Nd∶ YAG laser[J].Appl Phys,2002,A74(6):773-777.
[15]	FAN Y F.Study on the laser induced plasma in the laser micro machining[D].Guiyang:Guizhou University,2006:34-39(in Chinese).
[16]	PENG Ch P.Study on laser machining micro channels on quartz[D].Guiyang:Guizhou University,2007:24-25(in Chinese).
[17]	FAN Y F,QIN Sh J.Optical analysis of the plasma induced by the laser micromaching[J].Laser and Optoelectronics Progress,2006(6):64-67(in Chinese).
[18]	ZHOU B K,GAO Y Z,CHEN T R,et al.Principles of laser[M].5th ed.Beijing:National Defense Industry Press,2004:74-82(in Chinese).
[19]	HUANG J,REN H,LÜ H B,et al.Comparison of damage action of fused silica at different laser wavelength[J].Optics and Optoelectronic Technology,2007,5(6):5-8(in Chinese).
[20]	CHEN D L,FENG C L,QIN Sh J.Study on measuring surface-charges of cells in a quartz microchannel[J].Laser Technology,2009,33(6):561-564(in Chinese).

Research of the fabrication of micro channels in a fused silica substrate using laser-induced plasma

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