Study on arts and crafts of stainless steel micro-cantilever prepared with femtosecond laser

WANG Ying; LI Yu-hua; WANG Xin-lin; LIAO Chang-rui; LU Pei-xiang

doi:10.3969/j.issn.1001-3806.2010.03.017

In order to study the arts and crafts of stainless steel prepared with femtosecond laser,the technical condition and parametric optimization were studied in detail and applied in micromachining the micro-cantilever.The effect of laser fluence,scanning speed and scan times on the morphology of ablated area and ablation rate were analyzed.High quality micro-cantilevers in micrometer level were fabricated.The research shows that femtosecond laser micromachining is a promising and flexible way in micromachining of micro electromechanical devices.

Study on arts and crafts of stainless steel micro-cantilever prepared with femtosecond laser

Corresponding author: LU Pei-xiang, lup.Eixiang@mail.hust.Edu.cn

1. Wuhan National Laboratory for Optoelectronics, School of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;

2. School of Electrical Engineering, Nanhua University, Hengyang 421001, China

Received Date: 2009-05-12

Accepted Date: 2009-10-26

Available Online: 2010-05-25

Abstract: In order to study the arts and crafts of stainless steel prepared with femtosecond laser,the technical condition and parametric optimization were studied in detail and applied in micromachining the micro-cantilever.The effect of laser fluence,scanning speed and scan times on the morphology of ablated area and ablation rate were analyzed.High quality micro-cantilevers in micrometer level were fabricated.The research shows that femtosecond laser micromachining is a promising and flexible way in micromachining of micro electromechanical devices.

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Reference (16)

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Study on arts and crafts of stainless steel micro-cantilever prepared with femtosecond laser

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