[1] |
YOUNKIN R,CAREY J E,MAZUR E,et al.Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulse[J].Journal of Applied Physics,2003,93(5):2626-2629. |
[2] |
SEONGKUK L,YANG D F,NIKUMB S.Femtosecond laser micromilling of Si wafers[J].Applied Surface Science,2008,254(10):2996-3005. |
[3] |
LI P,WANG Y,FENG G J,et al.Study of silicon micro-structuring using ultra-short laser pulse[J].Chinese Journal of Lasers,2006,33(12):1688-1691(in Chinese). |
[4] |
ZHAO M,SU W F,ZHAO L.Micro-structured silicon-a new type of opto-electronic material[J].Physics,2003,32(7):455-457(in Chinese). |
[5] |
JIANG J,WU Zh M,WANG T,et al.A new revolutionary material-black silicon[J].Materials Review,2010,24(4):122-126(in Chinese). |
[6] |
QIAN Ch F,WANG Q K,LI H H.Design of black silicon with ultra-light-trapping structure[J].Acta Optica Sinica,2011,31(10):53-57. |
[7] |
GOLDENMAN J R,PRYBYLA J A.Ultrafast dynamics of laser-excited electron distribution in silicon[J].Physical Review Letters,1994,72(2):1364-1367(in Chinese). |
[8] |
GUO X D,LI R X,YU B K,et al.Recent developments in nanostructures on material surface induced by femtosecond laser[J].Laser and Optoelectronics Progress,2006(8):3-12(in Chinese). |
[9] |
WU W W,XU J M,CHEN H Y.Simulation of optical model base on micro-cones structure of "Black Silicon"[J].Chinese Journal of Lasers,2011,38(6):246-250(in Chinese). |
[10] |
HU Ch X,HUANG J Q,LIU Y,et al.A laser treatment system for silicon wafer:CN,202259383[P].2012-05-30(in Chinese). |