[1] ZHANG X H,AN Y M,HAN J C,et al.Graphene nanosheet reinforced ZrB2-SiC ceramic composite by thermal reduction of graphene oxide[J].RSC Advances,2015,5(58):47060-47065.
[2] XIE Y P,CHENG L F,MEI H,et al.Effect of SiC Particles on mechanical properties of laminated (SiCw+SiCp)/SiC ceramic composites[J].International Journal of Applied Ceramic Technology,2015,12(3):535-541.
[3] JING Y N,DENG X Y,LI J B,et al.Fabrication and properties of SiC/mullite composite porous ceramics[J].Ceramics International,2014,40(8):1329-1334.
[4] RAK Z S.A process for Cf/SiC composites using liquid polymer infiltration[J].Journal of the American Ceramic Society,2001,84(10):2235-2239.
[5] WU X F,WANG Y,ZHANG H Z.Experimental research on laser assisted machining of Silicon Nitride ceramics[J].Journal of Astronautics,2010,31(5):1457-1462(in Chinese).
[6] ZHANG X F,YU G Q,JIANG L W.Application of alumina ceramic[J].Foshan Ceramic,2010,20(2):38-43(in Chinese).
[7] YUAN G F,ZENG X Y.Laser forming research on brittle inorganic materials and the application status[J].LaserOptoelectronics Progress,2002,39(6):47-51(in Chinese).
[8] LING L,LOU Q H,LI S Z,et al.Microcutting Si wafer in water bath by second harmonic output of YAG laser[J].Laser Technology,2004,28(2):132-134(in Chinese).
[9] YUAN G F,YAO Y S,CHEN X H,et al.Experimental study on the quality of material surface applied laser-chemical combined etching[J].Chinese Journal of Lasers,2010,37(1):281-283(in Chinese).
[10] VASS C,OSVAY K,CSETE M,et al.Fabrication of 550nm gratings in fused silica by laser induced backside wet etching technique[J].Applied Surface Science,2007,253(19):8059-8063.
[11] QIAO Ch R.Development of EDM/Laser compound precision fine machining system[J].Manufacturing TechnologyMachine Tool,2004,17(2):46-50(in Chinese).
[12] KONG L R,ZHANG F,DUAN J,et al.Research of water-assisted laser etching of alumina ceramics[J].Laser Technology,2014,38(3):330-334(in Chinese).
[13] LONG Y H,XIONG L C,SHI T L.Experimental research of micromachining silicon by excimer laser ablation in air and under water[J].Laser Technology,2006,30(6):567-569(in Chinese).
[14] TAN Y L.Water jet guided laser technology[J].Superhard Material Gineering,2013,25(3):47-50(in Chinese).
[15] PORTER J A,LOUHISALMI A,KARJALAINEN J A,et al.Cutting thin sheet metal with a water jet guided laser using various cutting distances,feed speeds and angles of incidence[J].The International Journal of Advanced Manufacturing Technology,2007,33(9/10):961-967.