激光大尺度3维动态聚焦扫描加工系统研究

李东华; 邓磊敏; 段军; 曾晓雁; 游欣易

doi:10.7510/jgjs.issn.1001-3806.2016.04.002

激光大尺度3维动态聚焦扫描加工系统研究

1.
华中科技大学武汉光电国家实验室, 武汉 430074

作者简介: 李东华(1989-),男,硕士研究生,现主要从事光学设计及激光微加工系统的研究.

通讯作者: 段军, duans@hust.edu.cn ;

基金项目:
国家自然科学基金资助项目(51175205;51475182)
中图分类号: TG665;TN249

Study on large scale 3-D laser dynamic scanning manufacturing systems

1.
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science & Technology, Wuhan 430074, China

Corresponding author: DUAN Jun, duans@hust.edu.cn ;

CLC number: TG665;TN249

摘要: 为了满足激光3维微加工不断提高的精度要求、不断增大的加工尺寸范围,以及加工效率的上升需求,采用理论分析和计算结合的方法,研制出由动态聚焦镜和2维扫描振镜组合的动态聚焦系统,与高精度X-Y-Z 3维高精度工作台集成为一台激光大尺度3维动态聚焦扫描加工设备。设计了焦距为100mm、视场角15、光阑口径7mm、后工作距137mm、相对畸变小于0.5%的远心f-镜和入光口径8mm、光学杠杆比1:8、后工作距800mm40mm的动态聚焦镜系统,并使用ZEMAX软件对系统关键光学部件动态聚焦镜和远心f-镜进行光学设计及系统性能评价。结果表明,通过工艺控制软件分层拼接,实现了460mm310mm50mm大尺度3维动态聚焦的高精度紫外激光微加工功能,在该3维扫描范围内,激光聚焦光斑直径始终保持小于10m,从而满足大尺度激光3维精密微加工需求。
- 激光技术 /
- 3维动态聚焦 /
- 光学设计 /
- 3维微加工
Abstract: In order to meet the requirements of increasing precision, processing size and processing efficiency of 3-D laser micromachining, after theoretical analysis and calculation, a dynamic focusing system was designed combining the dynamic focusing lens with the 2-D galvanometer scanning system. A large scale 3-D laser dynamic focusing scanning processing system was proposed with the combination of the dynamic focusing system and a high precision X-Y-Z 3-D working stage. Telecentric f- lens was designed with focal length of 100mm, field angle of 15, aperture size of 7mm, back focal length of 137mm and relative distortion of less than 0.5%. And a dynamic focusing system was designed with aperture size of 8mm, optical leverage ratio of 1:8 and back focal length of 800mm40mm. ZEMAX was used to analyze and evaluate the optical design and system performance of the dynamic focusing lens and telecentric f- lens. The results show that, after layer stitching with the process control software, large-scale (460mm310mm50mm) 3-D dynamic focusing precision UV laser micromachining system is achieved. In 3-D scanning range, laser beam spot diameter remains always less than 10m and meets the needs of large-scale 3-D precision laser micromachining.
- laser technique /
- 3-D dynamic focusing /
- optical design /
- 3-D micro manufacture

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激光大尺度3维动态聚焦扫描加工系统研究

作者简介: 李东华(1989-),男,硕士研究生,现主要从事光学设计及激光微加工系统的研究.

通讯作者: 段军, duans@hust.edu.cn ;

Study on large scale 3-D laser dynamic scanning manufacturing systems

Corresponding author: DUAN Jun, duans@hust.edu.cn ;

计量

激光大尺度3维动态聚焦扫描加工系统研究

通讯作者: 段军, duans@hust.edu.cn;

作者简介: 李东华(1989-),男,硕士研究生,现主要从事光学设计及激光微加工系统的研究

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Study on large scale 3-D laser dynamic scanning manufacturing systems

Corresponding author: DUAN Jun, duans@hust.edu.cn

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留言板

激光大尺度3维动态聚焦扫描加工系统研究

作者简介: 李东华(1989-),男,硕士研究生,现主要从事光学设计及激光微加工系统的研究.

通讯作者: 段军, duans@hust.edu.cn ;

Study on large scale 3-D laser dynamic scanning manufacturing systems

Corresponding author: DUAN Jun, duans@hust.edu.cn ;

计量

出版历程

激光大尺度3维动态聚焦扫描加工系统研究

通讯作者: 段军, duans@hust.edu.cn;

作者简介: 李东华(1989-),男,硕士研究生,现主要从事光学设计及激光微加工系统的研究

English Abstract

Study on large scale 3-D laser dynamic scanning manufacturing systems

Corresponding author: DUAN Jun, duans@hust.edu.cn

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目录