一种快速鲁棒的光学表面划痕高精度检测方法

陈少杰; 李柏林; 赵文川; 熊鹰; 刘甲甲

doi:10.7510/jgjs.issn.1001-3806.2016.03.016

一种快速鲁棒的光学表面划痕高精度检测方法

1.
西南交通大学机械工程学院, 成都 610031;
2.
中国科学院光电技术研究所, 成都 610209

作者简介: 陈少杰(1990-),男,硕士研究生,现主要从事机器视觉、数字图像处理方面的研究。.

通讯作者: 李柏林, blli62@263.net ;

基金项目:
四川省科技支撑计划资助项目(2014GZ0005);西南交通大学博士创新基金资助项目;西南交通大学研究生创新基金资助项目(A0920502051410-3)
中图分类号: TP391.41

A fast, robust and precise method for measuring scratches on optical surfaces

1.
College of Mechanical Engineering, Southwest Jiaotong University, Chengdu 610031, China;
2.
The Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Corresponding author: LI Bailin, blli62@263.net ;

CLC number: TP391.41

摘要: 为了提高光学零件表面划痕定位测量和宽度测量的精度,采用基于离散正交多项式曲面拟合的亚像素边缘检测与宽度测量的算法,通过对边缘点及其邻域进行曲面拟合代替了只对边缘点梯度方向进行曲线拟合,实现了亚像素边缘检测;采取感兴趣区域加速策略与基于离散正交多项式曲面方程参量快速求解方法串联进行的加速方案,大大减少处理时间;在宽度计算方面,根据划痕长度自适应分段,分别计算每段分段点之间欧氏距离并作为其宽度,比较后取最大宽度作为划痕宽度。结果表明,该算法测量精度较高且具有较强的鲁棒性,同一划痕在不同视窗下测得宽度误差均值不超过5.2%,且标准差不超过0.3;在求解曲面模型参量的时间方面,该方法计算时间约为最小二方法的7.35%,处理效率显著提高。该方法能够满足工程应用中快速、高精度的测量要求。
- 测量与计量 /
- 划痕检测 /
- 曲面拟合 /
- 亚像素边缘提取 /
- 宽度测量
Abstract: In order to improve location and width measurement precision of optical surface scratches, a sub-pixel edge detection algorithm based on discrete orthogonal polynomial surface fitting was proposed. Sub-pixel edge detection was realized by fitting the edge points and their neighborhood into surfaces instead of by curve fitting only in the gradient direction of the edge points. By using the acceleration strategy of the region of interest and the method of fast solving surface equation parameters based on discrete orthogonal polynomial, the processing time was greatly reduced. In terms of width calculation, the Euclidean distance of each section was calculated after the scratch was divided into a series of small segments adaptively and then the maximum width was the width of scratch. The experimental results show that the proposed method has high accuracy and strong robustness. Mean error of width is less than 5.2% and standard deviation of width is less than 0.3 of the same scratches measured under different visual windows by this algorithm. In terms of processing time to solve the surface model parameter, the processing time of acceleration strategy is 7.35% of the least square method and is greatly reduced. This method can meet the requirements of fast and high precision measurement in engineering application.
- masurement and metrology /
- scratch detection /
- surface fitting /
- sub-pixel edge detection /
- width measurement

[1]	PAN Y Q, LIU P. Visualized detection of surface scratches on optical elements[J]. Journal of Xi'an Technological University,2012, 32(6):447-450(in Chinese).
[2]	CHEN X Y, LIU D, WANG S T, et al. Research on digital calibration method for optical surface defect dimension[J]. Proceedings of the SPIE,2012,8417:84173L.
[3]	ZHU C, YU G T, LI B L, et al. A new algorithm for measuring defects width on precise optics lens surface[J]. Computer Applications and Software, 2014, 31(12):259-261(in Chinese).
[4]	HERMOSILLA T, BERMEJO E, BALAGUER A, et al. Non-linear fourth-order image interpolation for subpixel edge detection and localization[J]. Image and Vision Computing, 2008, 26(9):1240-1248.
[5]	SUN Q C, ZHOU Y Z. A sub-pixel edge detection method based on cubic spline interpolation[J]. Control Engineering of China, 2014, 21(2):290-293(in Chinese).
[6]	LIANG Z J, WANG K F, GU G Q, et al. Digital speckle image correlation method base on particle swarm optimization algorithm[J]. Laser Technology,2014,38(5):603-607(in Chinese).
[7]	WU P, XU H L, SONG W L, et al. A non-linear quartic image interpolation based subpixel edge detection algorithm[J]. Journal of Harbin Engineering University, 2015, 36(2):1-6(in Chinese).
[8]	DA F, ZHANG H. Sub-pixel edge detection based on an improved moment[J].Image and Vision Computing, 2010, 28(12):1645-1658(in Chinese).
[9]	QU Y D, LI R D, BAI Y H, et al. A high-speed Zernike moments edge operator based on 99 masks[J]. Journal of OptoelectronicsLaser, 2010, 21(11):1683-1687(in Chinese).
[10]	TAO Z, CHEN S G, ZHANG B, et al. A fast subpixel edge detection method for image of micro-part[J].Proceedings of the SPIE,2013,8783:87831H.
[11]	CAI Y, YE L X. Non-contact measurement for outside screw-based on a modified sub-pixel edge detection algorithm of zernike moments[J].Journal of Shanghai Jiaotong University, 2014, 48(10):1468-1472(in Chinese).
[12]	GAO S Y, LIANG Y Q, YANG K Z. Defect detection of laser welding seam of unequal-thickness blank based on structured light vision[J]. Laser Technology,2011,35(4):440-443(in Chinese).
[13]	FABIJANSKA A. Gaussian-based approach to subpixel detection of blurred and unsharp edges[C]//Proceedings of the 2014 Federated Conference on Computer Science and Information Systems. Warsaw,Poland:Federated Conference on Computer Science and Information Systems,2014:641-650.
[14]	CHEN X Y, HU Y, BI F L. Precision Location of sub-pixel edge in CCD optical imaging systems[J]. Information and Control, 2014, 43(2):176-180(in Chinese).
[15]	CHEN X W, XU C H. Universal sub-pixel edge detection algorithm-based on extremal gradien[J]. Acta Geodaetica et Cartographica Sinica, 2014, 43(5):500-507(in Chinese).
[16]	ZHAO P, ZHAO W, DUAN Z, et al. Subpixel precise edge extraction algorithm based on facet model[C]//2012 Fourth International Conference on Computational and Information Sciences (ICCIS). New York,USA:IEEE,2012:86-89.
[17]	LI S, LU R S. Sub-pixel edge detection algorithm-based on gauss surface fitting[J]. Tool Engineering, 2011, 45(7):79-82(in Chinese).

[1]	李洪均 , 徐抒岩 , 闫得杰 . 遥感图像的亚像元匹配方法研究. 激光技术, 2008, 32(5): 493-495.
[2]	胡林亭 , 史德民 , 李佩军 , 任成才 . 激光监测系统测量精度的检测方法. 激光技术, 2008, 32(6): 670-672.
[3]	徐达 , 何凯平 , 熊伟 , 李华 , 高源 . 线激光散斑检测弹幕武器炮口振动测量方法. 激光技术, 2017, 41(6): 876-880. doi: 10.7510/jgjs.issn.1001-3806.2017.06.022
[4]	刘鹏 , 高立民 , 乐开端 . 应用于铁轨平直度检测的激光测量系统的研究. 激光技术, 2009, 33(6): 575-578. doi: 10.3969/j.issn.1001-3806.2009.06.005
[5]	孙园园 , 陈长缨 , 刘小冲 , 杨宇峰 , 肖勇盛 . 用于测量印刷机套印误差的光电检测系统. 激光技术, 2010, 34(4): 436-439. doi: 10.3969/j.issn.1001-3806.2010.04.002
[6]	于洪 . 飞秒激光脉冲宽度测量研究. 激光技术, 2013, 37(5): 679-681. doi: 10.7510/jgjs.issn.1001-3806.2013.05.025
[7]	范宜艳 , 赵斌 , 马国鹭 . 基于光学标靶与测距仪的隐藏区域坐标测量. 激光技术, 2014, 38(6): 723-728. doi: 10.7510/jgjs.issn.1001-3806.2014.06.001
[8]	杜志广 , 颜树华 , 林存宝 , 王国超 , 魏春华 . 双路信号相位同步测量系统设计与实现. 激光技术, 2016, 40(3): 315-319. doi: 10.7510/jgjs.issn.1001-3806.2016.03.003
[9]	朱红伟 , 叶会英 . 光反馈自混合干涉系统反馈水平的研究与测量. 激光技术, 2010, 34(6): 847-850. doi: 10.3969/j.issn.1001-3806.2010.06.034
[10]	肖兴维 , 马国鹭 , 曾国英 , 陆野 . 正交视觉与倾角仪组合空间位姿测量方法研究. 激光技术, 2020, 44(3): 278-282. doi: 10.7510/jgjs.issn.1001-3806.2020.03.002
[11]	陈曼龙 . 机器视觉螺纹测量的误差分析. 激光技术, 2014, 38(1): 109-113. doi: 10.7510/jgjs.issn.1001-3806.2014.01.024
[12]	张德斌 , 宋余华 , 王全胜 , 杜亚清 , 张新兴 , 张豪 . 激光发散角测量的误差分析. 激光技术, 2016, 40(6): 926-929. doi: 10.7510/jgjs.issn.1001-3806.2016.06.031
[13]	彭敦云 , 宋连科 , 栗开婷 , 郭文静 . 偏光干涉法测量液晶的双折射率. 激光技术, 2014, 38(3): 422-424. doi: 10.7510/jgjs.issn.1001-3806.2014.03.030
[14]	聂雪莹 , 项飞荻 , 黄欣 , 刘劲松 , 杨振刚 , 王可嘉 . 金属平板的太赫兹雷达散射截面测量. 激光技术, 2016, 40(5): 676-681. doi: 10.7510/jgjs.issn.1001-3806.2016.05.012
[15]	周策策 , 李杏华 . 基于机器视觉的螺纹参量测量系统. 激光技术, 2016, 40(5): 643-647. doi: 10.7510/jgjs.issn.1001-3806.2016.05.006
[16]	肖长江 , 张景超 , 魏勇 , 李兴元 , 胡学良 . 基于激光视觉原理测量玻璃中气泡的尺寸. 激光技术, 2015, 39(3): 391-394. doi: 10.7510/jgjs.issn.1001-3806.2015.03.024
[17]	刘顺涛 , 骆华芬 , 陈雪梅 , 徐静 . 结构光测量系统的标定方法综述. 激光技术, 2015, 39(2): 252-258. doi: 10.7510/jgjs.issn.1001-3806.2015.02.023
[18]	杨初平 , 刘建斌 , 谭穗妍 , 翁嘉文 . 应用频率积分相位解调测量径向畸变. 激光技术, 2014, 38(3): 402-405. doi: 10.7510/jgjs.issn.1001-3806.2014.03.026
[19]	金岩华 , 叶会英 , 孙瑶 . 基于相位解卷的位移测量系统. 激光技术, 2009, 33(4): 359-361,365. doi: 10.3969/j.issn.1001-3806.2009.04.007
[20]	丰伟 , 董明利 , 孙鹏 . 大型风电叶片动态摄影测量网络优化. 激光技术, 2021, 45(1): 19-24. doi: 10.7510/jgjs.issn.1001-3806.2021.01.004

点击查看大图

计量

文章访问数: 4581
HTML全文浏览量: 2173
PDF下载量: 181
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

留言板

一种快速鲁棒的光学表面划痕高精度检测方法

作者简介: 陈少杰(1990-),男,硕士研究生,现主要从事机器视觉、数字图像处理方面的研究。.

通讯作者: 李柏林, blli62@263.net ;

A fast, robust and precise method for measuring scratches on optical surfaces

Corresponding author: LI Bailin, blli62@263.net ;

计量

一种快速鲁棒的光学表面划痕高精度检测方法

通讯作者: 李柏林, blli62@263.net;

作者简介: 陈少杰(1990-),男,硕士研究生,现主要从事机器视觉、数字图像处理方面的研究。

English Abstract

A fast, robust and precise method for measuring scratches on optical surfaces

Corresponding author: LI Bailin, blli62@263.net

全文HTML

目录

留言板

一种快速鲁棒的光学表面划痕高精度检测方法

作者简介: 陈少杰(1990-),男,硕士研究生,现主要从事机器视觉、数字图像处理方面的研究。.

通讯作者: 李柏林, blli62@263.net ;

A fast, robust and precise method for measuring scratches on optical surfaces

Corresponding author: LI Bailin, blli62@263.net ;

计量

出版历程

一种快速鲁棒的光学表面划痕高精度检测方法

通讯作者: 李柏林, blli62@263.net;

作者简介: 陈少杰(1990-),男,硕士研究生,现主要从事机器视觉、数字图像处理方面的研究。

English Abstract

A fast, robust and precise method for measuring scratches on optical surfaces

Corresponding author: LI Bailin, blli62@263.net

全文HTML

目录