铬原子束沉积纳米光栅结构的3维仿真

张宝武; 马艳; 赵敏; 张文涛

doi:10.3969/j.issn.1001-3806.2011.03.020

铬原子束沉积纳米光栅结构的3维仿真

1.
中国计量学院计量测试工程学院, 杭州 310018;
2.
同济大学物理系, 上海 200092;
3.
桂林电子科技大学电子工程学院, 桂林 541004

作者简介: 张宝武(1978-)，男，博士，讲师，研究方向为原子光刻技术。Email:zhangbaowu1978@gmail.com.

中图分类号: O411.3;O56

3-D simulation of nano-grating by Cr atom beam deposition

1.
College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou 310018, China;
2.
Department of Physics, Tongji University, Shanghai 200092, China;
3.
Department of Electronic Engineering, Guilin University of Electronic Technology, Guilin 541004, China
CLC number: O411.3;O56

摘要: 为了研究铬原子经过波长为425.55nm 1维高斯激光驻波会聚作用后的沉积情况,采用原子与激光相互作用的原子轨道方法和波动方法两种理论模型进行了3维仿真。结果表明,同一激光功率条件下,两种方法的仿真条纹在激光束方向上都具有相同的周期性,在垂直激光束方向上具有非常相似的延展性,即随着激光功率的增加,原本的一条仿真条纹会逐渐分裂开来,由于原子波动性的影响,波动方法仿真的条纹中还有明显的干涉边峰,这种现象随着激光功率的增加而变得更加明显。这些仿真结果为实验提供了更加丰富的理论指导。
- 激光技术 /
- 激光会聚 /
- 原子束 /
- 原子波包 /
- 纳米光栅
Abstract: In order to study the deposition of 52Cr atomic interacted by a focused near-resonant Gaussian standing-laser at 425.55nm wavelength, 3-D simulation was carried out based on both particle-optics and wave-mechanical approaches. The results show that the deposited nano-grating has uniform period along laser vector direction, and similar structure along the direction perpendicular to laser vector. In addition, the deposited nano-grating may be split with the increase of laser power. Due to the wave property, the simulated nano-grating presents obvious interference side peak. All the simulation results provide abundant theory for experiments.
- laser technique /
- laser-focusing /
- atomic beam /
- atomic wave-packet /
- nano-grating

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铬原子束沉积纳米光栅结构的3维仿真

作者简介: 张宝武(1978-)，男，博士，讲师，研究方向为原子光刻技术。Email:zhangbaowu1978@gmail.com.

3-D simulation of nano-grating by Cr atom beam deposition

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铬原子束沉积纳米光栅结构的3维仿真

作者简介: 张宝武(1978-)，男，博士，讲师，研究方向为原子光刻技术。Email:zhangbaowu1978@gmail.com

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3-D simulation of nano-grating by Cr atom beam deposition

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铬原子束沉积纳米光栅结构的3维仿真

作者简介: 张宝武(1978-)，男，博士，讲师，研究方向为原子光刻技术。Email:zhangbaowu1978@gmail.com.

3-D simulation of nano-grating by Cr atom beam deposition

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铬原子束沉积纳米光栅结构的3维仿真

作者简介: 张宝武(1978-)，男，博士，讲师，研究方向为原子光刻技术。Email:zhangbaowu1978@gmail.com

English Abstract

3-D simulation of nano-grating by Cr atom beam deposition

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目录