高级检索

ISSN1001-3806CN51-1125/TN 网站地图

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

激光能量对沉积纳米Si薄膜晶粒尺寸的影响

陈俊领 段国平 黄明举

引用本文:
Citation:

激光能量对沉积纳米Si薄膜晶粒尺寸的影响

    作者简介: 陈俊领(1980- ),男,硕士研究生,主要从事硅薄膜方面的研究..
    通讯作者: 陈俊领, hmingju@163.com
  • 基金项目:

    省部共建河南大学科研基金资助项目(SBGJ090513)

  • 中图分类号:

    O782

Influence of laser energy on average size of Si nanoparticles deposited in thin film

    Corresponding author: CHEN Jun-ling, hmingju@163.com ;
  • CLC number:

    O782

  • 摘要: 为了制备纳米硅薄膜,采用脉冲激光沉积系统,保持靶材和衬底间距不变,在不同激光能量条件下,得到一系列纳米Si薄膜。利用喇曼散射光谱和X射线衍射谱对晶粒尺寸进行了计算和分析,取得了几组数据。结果表明,改变脉冲激光能量时,纳米Si晶粒平均尺寸均随能量的增强先增大后减小;在单脉冲能量为300mJ时制备的纳米Si晶粒平均尺寸最大,为8.58nm。这一结果对纳米硅薄膜制备的研究有积极意义。
  • [1]

    HE Y L,SHI Y.Improving characters of silicon devices using by ncSi:H films[J].Chinese Journal of Semiconductors,2003,24 (s1)192-197(in Chinese).
    [2]

    ZHAO Z X,LI M,ZHAN Y,et al.Band gap model and the I-Vcharacteristic of the nc-Si:H thin films deposited by RF-sputtering[J].Journal of Functional Materials and Devices,2009,15 (3):299302(in Chinese).
    [3]

    WEI W S,WANG T M,ZHANG C X,et al.Preferred growth of nanocrystalline silicon in boron-doped hydrogenated nanocrystalline silicon films[J].Journal of Functional Materials and Devices,2003,9(1):25 30(in Chinese).
    [4]

    ZHANG Q F,ZHU M F,LIU F Z,et al.Study of n-type nc-Si:H films and hetero function solar cells by HWCVD[J].Acta Energiae Solaris Sinica,2006,27 (7):691-694 (in Chinese).
    [5]

    AO Y H,HU S L,LONG H,et al.Study on pulsed laser deposition technology[J].Laser Technology,2003,27(5):453-459(in Chinese).
    [6]

    CHEN C Z,BAO Q H,YAO S S,et al.Pulsed laser deposition and its application[J].Laser Technology,2003,27 (5):443-446 (in Chinese).
    [7]

    TAKEHITO Y,SHIGERU T,YUKA Y,et al.Nanometer-sized silicon crystallites prepared by excimer laser ablation in constant pressure inert gas[J].Applied Physics Letter,1996,68(13):1772-1774.
    [8]

    FU G S,WANG Y L,CHU L Z,et al.The size distribution of Si nanaoparticles prepared by pulsed-laser ablation in pure He,Ar or Ne gas[J].Europhysics Letter,2005,69(5):758-762.
    [9]

    WANG Y L,CHU L Z,DENG Z C,et al.Size-uniform and controllable Si nanoparticles obtained by regulating target-to-substrate distance[J].Chinese Journal of Lasers,2009,36(4):989-992(in Chinese).
    [10]

    ZHANG X D,ZHAO Y,ZHU F,et al.Study of vertical non-uniformity of microcrystalline silicon thin film using Raman spectra and AFM[J].Journal of Synthetic Crystals,2004,33 (6):960-964 (in Chinese).
    [11]

    ZHANG L W,ZHAO J T,YANG G,et al.Raman analysis of microstructure of silicon thin films deposited at low temperatures[J].Semiconductor Optoelectronics,2007,28(1):58-59(in Chinese).
    [12]

    QIU S H,CHEN C Z,LIU C Q,et al.Raman analysis of crystalline properties of nano-crystalline silicon thin films prepared at low temperature by PECVD technique[J].Materials Research and Application,2008,2 (4):428-431 (in Chinese).
    [13]

    BRODSKY M H,CARDONA M,CUOMO J J.Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering[J].Physics Review,1977,B16(8):3556-3571.
    [14]

    ZHU L Y,HUANG X F,WANG L,et al.Fabrication of nc-Si array made by pulsed laser consisted constrained interference rystallization[J].Micronanoelectronic Technology,2002,39(7):17-20(in Chinese).
    [15]

    YUAN Z J,LOU Q H,ZHOU J,et al.Flat-top green laser crystallization of amorphous silicon thin film[J].Chinese Journal of Lasers,2009,36 (1):205-209 (in Chinese).
    [16]

    OSSADNIK C,VEPREK S,REGORA I G.Applicability of Raman scattering for the characterization of microcrystalline silicon[J].Thin Solid Films,1999,337 (1/2):148-151.
    [17]

    LI Q S,ZHANG Z C,SONG L,et al.Preparation and properties of nanometer-sized aantimony-doped SnO2 powders[J].Journal of East China University of Science and Technology,2002,28 (2):184-224(in Chinese).
    [18]

    ZHOU Y H,CHEN X J,QIAO Y,et al.Experiment investigation of femtosecond pulse laser deposition[J].Journal of Jianghan University (Natural Science Edition),2007,35 (4):33-36 (in Chinese).
    [19]

    WANG Y L,ZHANG H S,CHU L Z,et al.Influence of ambient gas on average size of Si nanoparticles deposited by pulsed laser ablation[J].Journal of Materials Engineering,2008,10 (61):247-250(in Chinese).
  • [1] 周德让段国平陈俊岭韩俊鹤黄明举 . 连续氩氪离子激光晶化非晶硅薄膜的研究. 激光技术, 2013, 37(5): 587-591. doi: 10.7510/jgjs.issn.1001-3806.2013.05.006
    [2] 吕海兵赵松楠严鸿维王韬晏良宏 . 用于高功率激光放大器的单层宽谱增透膜. 激光技术, 2016, 40(1): 38-41. doi: 10.7510/jgjs.issn.1001-3806.2016.01.009
    [3] 王成马莹张贵彦肖孟超甘志宏缪同群钱龙生 . 薄膜应力激光测量方法分析. 激光技术, 2005, 29(1): 98-100.
    [4] 李玉瑶王菲孙同同 . 薄膜激光损伤阈值标定技术. 激光技术, 2021, 45(6): 729-734. doi: 10.7510/jgjs.issn.1001-3806.2021.06.009
    [5] 陈传忠姚书山包全合张亮雷廷权 . 脉冲激光沉积羟基磷灰石薄膜的研究现状. 激光技术, 2004, 28(1): 74-77.
    [6] 何长涛马孜陈建国赵汝进 . 基于小波变换的薄膜激光损伤识别. 激光技术, 2007, 31(2): 131-133,136.
    [7] 常艳贺金春水邓文渊李春 . 193nm薄膜激光诱导损伤研究. 激光技术, 2011, 35(3): 308-311. doi: 10.3969/j.issn.1001-3806.2011.03.006
    [8] 宋秋艳陈根祥谭晓琳田恺 . 单壁碳纳米管薄膜制备及其光学特性研究. 激光技术, 2014, 38(2): 181-185. doi: 10.7510/jgjs.issn.1001-3806.2014.02.008
    [9] 常艳贺金春水李春邓文渊靳京城 . ArF准分子激光对氟化物高反射薄膜的诱导损伤. 激光技术, 2014, 38(3): 302-306. doi: 10.7510/jgjs.issn.1001-3806.2014.03.004
    [10] 李玉瑶张婉怡刘喆李美萱付秀华S-on-1测量方式下薄膜激光损伤的累积效应. 激光技术, 2018, 42(1): 39-42. doi: 10.7510/jgjs.issn.1001-3806.2018.01.008
    [11] 张大伟贺洪波邵建达范正修 . 离子束辅助沉积制备高功率激光薄膜的研究. 激光技术, 2008, 32(1): 57-60.
    [12] 崔文东张鹏翔刘翔张国勇谈松林戴永年 . 巨磁阻薄膜激光感生电压的温度稳定性研究. 激光技术, 2007, 31(6): 636-638.
    [13] 刘国芳高传玉杨晓红马明李奇军 . 激光驱动飞片加载下基体/薄膜层裂微成形研究. 激光技术, 2012, 36(3): 298-300.
    [14] 周维军袁永华桂元珍 . 激光辐照TiO2/SiO2薄膜损伤时间简捷测量. 激光技术, 2007, 31(4): 381-383.
    [15] 周维军袁永华张大勇桂元珍江继军 . 1.06μm连续激光辐照TiO2/SiO2薄膜元件的损伤效应研究. 激光技术, 2006, 30(1): 76-77,81.
    [16] 李勇张辉周小芳张鹏翔 . 氧压对Zn1-xAlxO薄膜结构的影响及激光感生电压效应. 激光技术, 2011, 35(1): 130-132,140. doi: 10.3969/j.issn.1001-3806.2011.01.035
    [17] 戴罡陆建王斌刘剑倪晓武 . 脉宽1ms和10ns的激光损伤光学薄膜元件的比较分析. 激光技术, 2011, 35(4): 477-480,542. doi: 10.3969/j.issn.1001-3806.2011.04.010
    [18] 雷洁红段浩邢丕峰唐永建 . 常用间隔层材料软X射线多层膜的设计. 激光技术, 2011, 35(3): 415-417. doi: 10.3969/j.issn.1001-3806.2011.03.033
    [19] 陈传忠包全合姚书山雷廷权 . 脉冲激光沉积技术及其应用. 激光技术, 2003, 27(5): 443-446.
    [20] 王泽敏戢明曾晓雁 . 脉冲激光沉积Al膜的沉积模式及沉积速率研究. 激光技术, 2006, 30(3): 265-267,310.
  • 加载中
计量
  • 文章访问数:  3276
  • HTML全文浏览量:  520
  • PDF下载量:  798
  • 被引次数: 0
出版历程
  • 收稿日期:  2011-07-27
  • 录用日期:  2011-09-05
  • 刊出日期:  2012-05-25

激光能量对沉积纳米Si薄膜晶粒尺寸的影响

    通讯作者: 陈俊领, hmingju@163.com
    作者简介: 陈俊领(1980- ),男,硕士研究生,主要从事硅薄膜方面的研究.
  • 1. 河南大学 物理与电子学院 河南省光电信息材料与器件重点学科开放实验室 开封 475001
基金项目:  省部共建河南大学科研基金资助项目(SBGJ090513)

摘要: 为了制备纳米硅薄膜,采用脉冲激光沉积系统,保持靶材和衬底间距不变,在不同激光能量条件下,得到一系列纳米Si薄膜。利用喇曼散射光谱和X射线衍射谱对晶粒尺寸进行了计算和分析,取得了几组数据。结果表明,改变脉冲激光能量时,纳米Si晶粒平均尺寸均随能量的增强先增大后减小;在单脉冲能量为300mJ时制备的纳米Si晶粒平均尺寸最大,为8.58nm。这一结果对纳米硅薄膜制备的研究有积极意义。

English Abstract

参考文献 (19)

目录

    /

    返回文章
    返回