[1] SMARTT R N,STRONG J.Point diffraction intefferometer[J].Journal of the Optical Society of America,1972,62:737-742.
[2] OTAKI K,ZHU Y,ISHII M,et al.Rigorous wavefront analysis of the visiblc-light point diffraction interferometer for EUVL[J].Proceedings of SPIE,2004,5193:182-190.
[3] GAO F,JIANG Z D,LI B.Diffraction wavefront analysis of point diffraction interferometer for measurement of aspherical surface[J].Proceedings of SPIE,2010,7656:1-8.
[4] TSOY V I,MELNIKOV L A.Diffraction by extremely small holes in thin absorbing and transparent screens and by disks[J].Optics Communications,2008,281 (8):1935-1940.
[5] MA Q,LIU W Q,LI X B,et al.Analysis of diffraction wavefront error in point diffraction interferometer[J].Acta Optics Sinica,2008,28(12):2321-2324(in Chinese).
[6] LAI Ch W,DENG X J,WANG G A,et al.Energy transmission of nonparaxial vector diffraction beam[J].Laser Technology,2009,33(4):446-448(in Chinese).
[7] LU Z X,JIN C S,ZHANG L C,et al.Wavefront quality analysis of three dimension pinhole vector diffractional in extreme ultraviolet region[J].Acta Optica Sinica,2010,30 (10):2849-2854 (in Chinese).
[8] GE D B,YAN Y B.Finite difference time domain method for electromagnetic wave[M].Xi'an:Xi'an University Press,2005:11-34 (in Chinese).
[9] JUN S Y,ATSUSHI Y,TAKANORI M,et al.A finite-difference time-domain beam-propagation method for TE and TM wave analyses[J].Journal of Lightwave Technology,2003,21 (7):1709 1715.
[10] MASOUDI H M,AISUNAIDI M A,ARNOID J M.Time-domain finite-difference beam propagation method[J].Photonics Technology Letters,1999,11 (10):1274-1276.
[11] JOHN D J.Classical electrodynamics[M].Beijing:People's Education Press,1978:481-500 (in Chinese).
[12] YANG J W,HUANG Q L,HAN Y M.Application and simulation in fitting optical surfa.ce with Zernike polynomial[J].Spacecraft Recovery & Remote Sensing,2010,31 (5):49-55 (in Chinese).
[13] ZHANG W,LIU J F,LONG F N,et al.Study on wavefront fitting using Zernike polynomials[J].Optical Technique,2005,31 (5):675-678 (in Chinese).
[14] HUI M,NIU H B.A method of wavefront data fitting using Zernike polynomials[J].Acta Optica Sinica,1999,28 (12):1113-1116(in Chinese).