[1] VERSLOOT T W, MOLKENBOER F T, BEKMAN H, et al. In-situ diagnostics for plasma based extreme ultraviolet light sources[EB/OL]. (2012-12-21) [2019-12-10]. https://www.euvlitho.com/2012/S22.pdf.
[2] TOMIE T. Tin laser-produced plasma as the light source for extreme ultraviolet lithography high-volume manufacturing: History, ideal plasma, present status, and prospects[J]. Journal of Micro/Nanolithography Mems & Moems, 2012, 11(2): 21109-21101.
[3] TANG J, ZUO D L, YANG Ch G, et al. Spectroscopic diagnosis of air plasma induced by pulsed CO2 laser[J]. Laser Technology, 2013, 37(5): 636-641(in Chinese).
[4] ZHAO X X, HE J F, WANG H Y, et al. Inverse bremsstrahlung effect in process of laser-induced copper plasma[J]. Laser Technology, 2014, 38(3): 357-359(in Chinese).
[5] ZHOU S S, WANG X B, ZUO D L. Study on characteristics of graphite plasma induced by pulsed laser[J]. Chinese Journal of Lasers, 2019, 46(1): 111001(in Chinese).
[6] WU Y, BAI Sh B, WANG J Y, et al. The methods of plasma diagnosis by microwave[J]. Optoelectronic Technology, 2007, 27(1): 49-54(in Chinese).
[7] HUANG J, YANG L, CHEN L, et al. Methods for diagnosing air switch plasma via laser interferometry[J]. Acta Optica Sinica, 2019, 39(5): 0512003(in Chinese). doi: 10.3788/AOS201939.0512003
[8] PU Y Y. Microwave diagnosis technology of plasma parameters[D]. Xi'an: Xi'an University of Technology, 2019: 1-3(in Chinese).
[9] WANG T, ZHANG T P, ZHAGN H L, et al. Analysis and design of Langmuir probe for diagnosis of ion thruster discharge plasma[J]. Vacuum and Cryogenics, 2018, 24(4): 275-278(in Chinese).
[10] IMPEDANS PLASMA MEASUREMENT CO. Langmuir probe used in an RF dusty plasma to measure the dust charge and density[EB/OL]. (2017-12-21)[2019-12-10] https://www.impedans.com/sites/default/files/pdf_downloads/LP02.pdf.
[11] PICKOVA I, TICHY M, KUDRNA P. Langmuir probe measurements in electronegative RF plasma[C]//WDS'13 Proceedings of Contributed Papers Part Ⅱ. New York, USA: IEEE, 2013: 134-138.
[12] ZHANG X L, WANG X B, LI G F. Research of plasma characteristics of the radio-frequency discharge in O2 and its mixtures[J]. Ch-inese Physics Letters, 2009, 26(2): 126-129.
[13] von GUTFELD R J, DREYFUS R W. Electronic probe measurements of pulsed copper ablation at 248 nm[J]. Applied Physics Letters, 1989, 54(13): 1212-1214. doi: 10.1063/1.100718
[14] JORDAN R, LUNNEY J G. Investigation of excimer laser ablation of iron[J]. Applied Surface Science, 1998, 127/129: 968-972. doi: 10.1016/S0169-4332(97)00775-7
[15] HANSEN T N, SCHOU J, LUNNEY J G. Angular distributions of silver ions and neutrals emitted in vacuum by laser ablation[J]. Europhysics Letters, 1997, 40(4): 441-446. doi: 10.1209/epl/i1997-00485-9
[16] TOFTMANN B, SCHOU J, HANSEN T N, et al. Angular distribution of electron temperature and density in a laser-ablation plume[J]. Physical Review Letters, 2000, 84(17): 3998-4001. doi: 10.1103/PhysRevLett.84.3998
[17] DOGGETT B, LUNNEY J G. Langmuir probe characterization of laser ablation plasmas[J]. Journal of Applied Physics, 2009, 105(3): 33306. doi: 10.1063/1.3056131
[18] DONNELLY T, DOGGETT B, LUNNEY J G. Pulsed laser deposition of nanostructured Ag films[J]. Applied Surface Science, 2006, 252(13): 4445-4448. doi: 10.1016/j.apsusc.2005.06.048
[19] GAMBINO N, BRANDSTATTER M, ROLLINGER B R, et al. A hemispherical Langmuir probe array detector for angular resolved measurements on droplet-based laser-produced plasmas[J]. Review of Scientific Instruments, 2014, 85(9): 093302. doi: 10.1063/1.4894676
[20] YANG R Q. Study on plume expansion and radiation spectra of pulse laser produced tin plasma[D]. Wuhan: Huazhong University of Science & Technology, 2015: 27-41(in Chinese).
[21] DOU Y P. Research on laser-produced Gd target plasma source at 6.7nm for lithography[D]. Changchun: Changchun University of Science and Technology, 2015: 60-65(in Chinese).
[22] LAN H. Research on the characteristics of laser produced Sn and SnO2 plasma[D]. Wuhan: Huazhong University of Science & Technology, 2016: 38-50(in Chinese).
[23] GAMBINO N, MASCALI D, TUDISCO S, et al. Study of laser plasmas dynamics through real and virtual langmuir probes[J]. IEEE Transactions on Plasma Science, 2013, 41(10): 3048-3057. doi: 10.1109/TPS.2013.2281115
[24] CONDE L. An introduction to Langmuir probe diagnostics of plasmas[EB/OL]. (2011-5-04) [2019-12-10].http://plasmalab.aero.upm.es/~lcl/PlasmaProbes/Probes-2010-2.pdf.