| [1] | DENG G Q,YU Y Sh.Development and experimental study of excimer laser refractive system[J].Laser Technology,2005,29(4):417-419(in Chinese). |
| [2] | OGURA G,ANDRES R.Small excimers opening up new industrial applications[J].Proc SPIE,1997,2992:7-14. |
| [3] | GORTLER A,STROWITZKI C.Progress in the development of compact excimer lasers[J].Proc SPIE,2005,5777:562-565. |
| [4] | GORTLER A,MATERN A.Compact excimer lasers for metrology and inspection applications[J].Proc SPIE,2004,5457:105-115. |
| [5] | LONG W H,Jr,PLUMMER M J,STAPPAERTS E A.Efficient discharge pumping of an XeCl laser using a high-voltage prepulse[J].A P L,1983,43(8):735-737. |
| [6] | KUSHNER M J.Microarcs as a termination mechanism of optical pulses in electric-discharge excited KrF excimer lasers[J].IEEE Transactions on Plasma Science,1991,19(2):387-399. |
| [7] | SHI M M,JIANG H H,DENG G Q,et al.Development of controller for excimer laser based on optical fiber[J].Laser Technology,2009,33(1):100-104(in chinese). |
| [8] | HOKAZONO H,MIDORIKAWA K,OBARA M,et al.Theoretical analysis of a self-sustained discharge pumped XeCl laser[J].J A P,1984,56(3):680-690. |
| [9] | TAYLAR R S.Preionization and discharge stability study of long optical pulse duration UV-preionized XeCl lasers[J].J A P,1986,B41(1):1-24. |
| [10] | DENG G Q,ZHU Zh Q,YU Y Sh.Study of the low gain excimer laser optimum transmission[J].Acta Optica Sinica,2005,25(3):359-363(in Chinese). |