[1] VELANKI S,JI H F.Detection of feline coronavirus using microcantilever sensors[J].Measurement Science and Technology,2006,17(11):2964-2968.
[2] KOOSER A,GUNTER R L,DELINGER W D,et al.Gas sensing using embedded piezoresistive microcantilever sensors[J].Sensors and Actuators,2004,B99(2/3):474-479.
[3] LI S Q,LI Zh M,ORONA L,et al.Biosensor-based magnetostrictive microcantilever[J].Proc SPIE,2005,5798:207-215.
[4] SIBANIL L,DIGVIJAY R,ALISON C,et al.Nanomechanical detection of DNA melting on microcantilever surfaces[J].Analytical Chemistry,2006,78(20):7104-7109.
[5] NELSON I C,BANERJEE D,ROGERS W J,et al.Detection of explosives using heated micro-cantilever sensors[J].Proc SPIE,2006,6223:62230O.
[6] WANG J J,XIE H F,ZHOU J,et al.Development of microcantilever-based chemical and biological sensors[J].Microelectronics,2004,34(5):493-496(in Chinese).
[7] KIM J S,JIANG K,CHANG I.A net shape process for metallic microcomponent fabrication using Al and Cu micro/nano powders[J].Journal of Micromechanics and Microengineering,2006,16(1):48-52.
[8] CHAKRABORTY A,LUO Ch.Fabrication and application of metallic nano-cantilevers[J].Microelectronics Journal,2006,37(11):1306-1312.
[9] YANG Y,IMASOGIE B I,ALLAMEH S M,et al.Mechanism of fatigue in LIGA Ni MEMS thin films[J].Materials Science and Engineering,2007,A444(1/2):39-50.
[10] MANNION T,MAGEE J,COYNE E,et al.The effect of damage accumulation behavior on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air[J].Applied Surface Science,2004,233(1/4):257-287.
[11] LI Ch,NIKUNB S,WONG F.An optimal process of femtosecond laser cutting of NiTi shape memory alloy for fabrication of miniature devices[J].Optics & Lasers in Engineering,2006,44(10):1078-1087.
[12] COLOMBIER J P,COMBIS P,HUOT H,et al.Suited simulations for optimal ultrafat laser processing of metals[J].Proc SPIE,2006,6106:61060L.
[13] NI X C,SUN Q,WANG Ch Y,et al.Study on writing transmission metal grating with pulse shaping of femtosecond laser[J].Journal of Physics:Conference Series,2006,48(1):1011-1016.
[14] WANG J Zh,SHI T L,XIONG L C.A shortened procedure of micro-electromechanical systems fabrication by means of femtosecond laser[J].Laser Technology,2008,32(1):88-91(in Chinese).
[15] WANG Z J,JIA W,NI X C,et al.Numerical simulation of the heat affected zone of nickel ablated with femtosecond laser[J].Laser Technology,2007,31(6):578-580(in Chinese).
[16] CHEN T C,DARLING R B.Parametric studies on pulsed near ultraviolet frequency tripled Nd:YAG laser micromachining of sapphire and silicon[J].Journal of Material Processing Technology,2005,169(2):214-218.