| [1] | KIM M S, KIM S W. Two-way frequency-conversion phase measurement for high-speed and high-resolution heterodyne interferometry[J]. Measurement Science and Technology, 2004, 15(6):2341-2348. |
| [2] | AGILENT TECHNOLOGIES. Laser and optics user's manual.Clara, CA, USA:Agilent Technologies, 2002:05517-90045. |
| [3] | YIM N B, EOM C I, KIM S W. Dual mode phase measurement for optical heterodyne interferometry[J]. Measurement Science and Technology, 2000, 11(3):1131-1137. |
| [4] | DUAN W W, YU L, LI S J.A king of improved CORDIC algorithm and its implementation in FPGA[J].Microelectronics & Computer, 2012, 29(2):95-98(in Chinese). |
| [5] | ZHANG J B, LIANG F, LIU N A. FPGA implement of a modified CORDIC algorithm[J]. Microelectronics & Computer, 2010, 27(11):181-184 (in Chinese). |
| [6] | ZHANG N. Software method used in phase-measuring of space optical heterodyne system[D].Wuhan: Huazhong University of Science and Technology, 2010:12-16(in Chinese). |
| [7] | WANG L, HOU W M. Single frequency laser interferometer based on Koester prism[J]. Measurement Technique, 2006, 11(1):29-32 (in Chinese). |
| [8] | LIU X Q, LIU B, MA X P.High-precision intermediate-frequency digital phase detector based on FPGA[J].Nuclear Techniques, 2012, 35(5):380-385 (in Chinese). |
| [9] | WARE B, FOLKNER W M, SHADDOCK D, et al. Phase measurement system for inter-spacecraft laser metrology[C]//The Sixth Annual NASA Earth Science Technology Conference 2006. Maryland, MD, USA:NASA, 2006: 1-5. |
| [10] | QIU X Q, LE Y F, WANG J. Interpolation of heterodyne interferometric signals based on FPGA[J]. Laser Technology, 2011, 35(2):199-201 (in Chinese). |
| [11] | SHI Y, JU A S, LE Y F. Heterodyne interference signal processing method based on FPGA[J]. Laser Technology, 2012, 36(2):225-227 (in Chinese). |
| [12] | ZHANG G Z. Dual-differential phase discrimination phase measurement system based on PLL frequency-mixing[D].Hangzhou: Zhejiang University of Science and Technology, 2005:31-54 (in Chinese). |
| [13] | ZHAO S W, YAN L P, YANG T, et al. Signal processing method of the laser heterodyne interferometry based on DSP[J]. Journal of Zhejiang Science and Technology University, 2011, 28(2):217-220(in Chinese). |
| [14] | LIANG Y R, YE X J. High precision phasemeter for inter-spacecraft laser metrology[C]//China's Space of Deep Space Exploration Technology Professional Committee of the Eighth Session of the Symposium.Shanghai: CDSET-CSA, 2011: 529-535(in Chinese) |
| [15] | MAGNUS T L H, IAN C M L, DANIEL A S, et al. Subpicometer length measurement using heterodyne laser inteferometry and all-digital rf phase meters[J].Optics Letters, 2010, 35(24):4202-4204. |
| [16] | JIANG Y Q, HE Y G. New algorithm for high-accuracy phase difference measurement based on windowed DFT[J]. Journal of Circuits and Systems, 2005, 10(2): 112-116 (in Chinese). |
| [17] | SONG Ch B, LI Zh G, ZHU X S. A method & error analysis of phase difference measurement based on digital quadrature transformation[J]. Journal of Circuits and Systems, 2006, 11(1): 143-146 (in Chinese). |